Koichi Fukuda

Person

Sendai, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Impedance measurement tool
- Patent number 6,452,408
- Issue date Sep 17, 2002
- Alps Electric Co., Ltd.
- Akira Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment equipment
- Patent number 6,349,670
- Issue date Feb 26, 2002
- Alps Electric Co., Ltd.
- Akira Nakano
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus
- Patent number 6,270,618
- Issue date Aug 7, 2001
- Alps Electric Co., Ltd.
- Akira Nakano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus, matching box, and feeder
- Patent number 6,155,202
- Issue date Dec 5, 2000
- Alps Electric Co., Ltd.
- Akira Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,148,762
- Issue date Nov 21, 2000
- Frontec Incorporated
- Koichi Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber for CVD and sputtering film manufacturing
- Patent number 5,755,938
- Issue date May 26, 1998
- Alps Electric Co., Ltd.
- Hirofumi Fukui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic element and method of producing same
- Patent number 5,623,161
- Issue date Apr 22, 1997
- Frontec, Incorporated
- Koichi Fukuda
- G02 - OPTICS
Information Patent Grant
Film manufacturing method using single reaction chamber for chemica...
- Patent number 5,609,737
- Issue date Mar 11, 1997
- Frontec Incorporated
- Hirofumi Fukui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate surface potential measuring apparatus and plasma equipment
- Patent number 5,570,031
- Issue date Oct 29, 1996
- Frontec Incorporated
- Makoto Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Method of sputtering a silicon nitride film
- Patent number 5,550,091
- Issue date Aug 27, 1996
- Frontec Incorporated
- Koichi Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20090194028
- Publication date Aug 6, 2009
- Koichi FUKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen sensor and hydrogen detection system
- Publication number 20050072673
- Publication date Apr 7, 2005
- Alps Electric Co., Ltd.
- Koichi Fukuda
- G01 - MEASURING TESTING

Koichi Fukuda

Person

Patents Grantslast 30 patents

Impedance measurement tool

Plasma treatment equipment

Plasma processing apparatus

Plasma processing apparatus, matching box, and feeder

Plasma processing apparatus

Single chamber for CVD and sputtering film manufacturing

Electronic element and method of producing same

Film manufacturing method using single reaction chamber for chemica...

Substrate surface potential measuring apparatus and plasma equipment

Method of sputtering a silicon nitride film

Patents Applicationslast 30 patents

PLASMA PROCESSING DEVICE

Hydrogen sensor and hydrogen detection system