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Koichi Moriizumi
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Tokyo, JP
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last 30 patents
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Patent Grant
Apparatus and process for pattern distortion detection for semicond...
Patent number
6,343,370
Issue date
Jan 29, 2002
Mitsubishi Denki Kabusiki Kaisha
Hironobu Taoka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for inhibiting pattern distortions to correct...
Patent number
6,298,473
Issue date
Oct 2, 2001
Mitsubishi Denki Kabushiki Kaisha
Yusaku Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
boundary processing of oblique overlapping graphics to achieve dime...
Patent number
6,271,852
Issue date
Aug 7, 2001
Mitsubishi Denki Kabushiki Kaisha
Kinya Kamiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing highly precise charged beam drawing data divide...
Patent number
6,088,520
Issue date
Jul 11, 2000
Mitsubishi Denki Kabushiki Kaisha
Hironobu Taoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern comparison inspection system and method employing gray leve...
Patent number
6,069,971
Issue date
May 30, 2000
Mitsubishi Denki Kabushiki Kaisha
Makoto Kanno
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged beam pattern data generating method and a charged beam patt...
Patent number
5,812,412
Issue date
Sep 22, 1998
Mitsubishi Denki Kabushiki Kaisha
Koichi Moriizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing data production apparatus and charged...
Patent number
5,796,408
Issue date
Aug 18, 1998
Mitsubishi Denki Kabushiki Kaisha
Kinya Kamiyama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron-beam exposure apparatus
Patent number
5,153,441
Issue date
Oct 6, 1992
Mitsubishi Denki Kabushiki Kaisha
Koichi Moriizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam exposure method
Patent number
5,086,398
Issue date
Feb 4, 1992
Mitsubishi Denki Kabushiki Kaisha
Koichi Moriizumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of preparing drawing data for charged beam exposure system
Patent number
5,008,830
Issue date
Apr 16, 1991
Mitsubishi Denki Kabushiki Kaisha
Koichi Moriizumi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor memory cells having common contact hole
Patent number
4,984,199
Issue date
Jan 8, 1991
Mitsubishi Denki Kabushiki Kaisha
Masahiro Yoneda
G11 - INFORMATION STORAGE
Information
Patent Grant
Semiconductor memory device
Patent number
4,887,137
Issue date
Dec 12, 1989
Mitsubishi Denki Kabushiki Kaisha
Masahiro Yoneda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged beam pattern defect inspection apparatus
Patent number
4,794,646
Issue date
Dec 27, 1988
Mitsubishi Denki Kabushiki Kaisha
Susumu Takeuchi
G06 - COMPUTING CALCULATING COUNTING