Number | Date | Country | Kind |
---|---|---|---|
60-179012 | Aug 1985 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3699304 | Baldwin, Jr. et al. | Oct 1972 | |
3813545 | Barnhart et al. | May 1974 | |
4115802 | Kramer et al. | Sep 1978 | |
4514629 | Smith et al. | Apr 1985 | |
4567364 | Kano et al. | Jan 1986 | |
4581762 | Lapidus et al. | Apr 1986 | |
4600839 | Ichihashi et al. | Jul 1986 | |
4644172 | Sandland et al. | Feb 1987 | |
4680469 | Nomura et al. | Jul 1987 |
Entry |
---|
Harris et al., "Automated Inspection of Wafer Patterns with Applications in Stepping, Projection and Direct-Write Lithography", Solid State Technology, Feb. 1984. |