Koichi Shimada

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Oshu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus having ground electrode
- Patent number 9,970,111
- Issue date May 15, 2018
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Assembly method for vacuum processing apparatus
- Patent number 8,943,669
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Koichi Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process tube for manufacturing semiconductor wafers
- Patent number D600659
- Issue date Sep 22, 2009
- Tokyo Electron Limited
- Hiroyuki Matsuura
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230033715
- Publication date Feb 2, 2023
- TOKYO ELECTRON LIMITED
- Koichi SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20150107515
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Koichi SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150007772
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND ASSEMBLY METHOD THEREOF
- Publication number 20120118229
- Publication date May 17, 2012
- TOKYO ELECTRON LIMITED
- Koichi SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...