Koji Shigematsu

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination optical system, exposure apparatus and device manufact...
- Patent number 10,520,825
- Issue date Dec 31, 2019
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,241,417
- Issue date Mar 26, 2019
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,234,770
- Issue date Mar 19, 2019
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Illumination optical system, exposure apparatus and device manufact...
- Patent number 10,168,620
- Issue date Jan 1, 2019
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,120,291
- Issue date Nov 6, 2018
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,031,425
- Issue date Jul 24, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 10,007,194
- Issue date Jun 26, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,989,865
- Issue date Jun 5, 2018
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,684,247
- Issue date Jun 20, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,684,246
- Issue date Jun 20, 2017
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus and device manufact...
- Patent number 9,563,130
- Issue date Feb 7, 2017
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,429,848
- Issue date Aug 30, 2016
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,423,694
- Issue date Aug 23, 2016
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Lighting optical device, regulation method for lighting optical dev...
- Patent number 9,235,133
- Issue date Jan 12, 2016
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Grant
Polarization-modulating element, illumination optical apparatus, ex...
- Patent number 9,140,990
- Issue date Sep 22, 2015
- Nikon Corporation
- Osamu Tanitsu
- F21 - LIGHTING
Information Patent Grant
Illumination optical system, exposure apparatus and device manufact...
- Patent number 8,934,086
- Issue date Jan 13, 2015
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical apparatus, exposure apparatus and device manuf...
- Patent number 8,325,324
- Issue date Dec 4, 2012
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lighting optical device, exposure system, and exposure method
- Patent number 8,004,658
- Issue date Aug 23, 2011
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system, exposure apparatus, and device productio...
- Patent number 7,154,585
- Issue date Dec 26, 2006
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system, a projection exposure apparatus provided...
- Patent number 6,947,121
- Issue date Sep 20, 2005
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system, a projection exposure apparatus, and a p...
- Patent number 6,912,094
- Issue date Jun 28, 2005
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system and exposure apparatus and method
- Patent number 6,700,645
- Issue date Mar 2, 2004
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, a photolithography method, and a device manufac...
- Patent number 6,600,550
- Issue date Jul 29, 2003
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system and exposure apparatus and method
- Patent number 6,333,781
- Issue date Dec 25, 2001
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Grant
Projection optical system and exposure apparatus and method
- Patent number 6,259,508
- Issue date Jul 10, 2001
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,084,723
- Issue date Jul 4, 2000
- Nikon Corporation
- Hitoshi Matsuzawa
- G02 - OPTICS
Information Patent Grant
Information storage apparatus and method for operating the same
- Patent number 5,963,472
- Issue date Oct 5, 1999
- NKK Corporation
- Nobufumi Inada
- G11 - INFORMATION STORAGE
Information Patent Grant
Information storage apparatus and method for operating the same
- Patent number 5,848,002
- Issue date Dec 8, 1998
- NKK Corporation
- Nobufumi Inada
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...
- Publication number 20190086811
- Publication date Mar 21, 2019
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20180341185
- Publication date Nov 29, 2018
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20170227854
- Publication date Aug 10, 2017
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...
- Publication number 20170108782
- Publication date Apr 20, 2017
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...
- Publication number 20150092173
- Publication date Apr 2, 2015
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVIC...
- Publication number 20140043594
- Publication date Feb 13, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20140028990
- Publication date Jan 30, 2014
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20130271945
- Publication date Oct 17, 2013
- Osamu TANITSU
- G02 - OPTICS
Information Patent Application
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...
- Publication number 20130242527
- Publication date Sep 19, 2013
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...
- Publication number 20110310375
- Publication date Dec 22, 2011
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20110273697
- Publication date Nov 10, 2011
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20090316132
- Publication date Dec 24, 2009
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...
- Publication number 20090135396
- Publication date May 28, 2009
- Nikon Corporation
- Yasushi Mizuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20090073414
- Publication date Mar 19, 2009
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20090073441
- Publication date Mar 19, 2009
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...
- Publication number 20090040490
- Publication date Feb 12, 2009
- Nikon Corporation
- Koji SHIGEMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, device manufacturing method and exposure method
- Publication number 20080246932
- Publication date Oct 9, 2008
- Nikon Corporation
- Koji Shigematsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lighting Optical Device, Regulation Method for Lighting Optical Dev...
- Publication number 20080030707
- Publication date Feb 7, 2008
- Nikon Corporation
- Hirohisa Tanaka
- G02 - OPTICS
Information Patent Application
Lighting Optical Device,Exposure System,And Exposure Method
- Publication number 20080030852
- Publication date Feb 7, 2008
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
Method of adjusting lighting optical device, lighting optical devic...
- Publication number 20070146676
- Publication date Jun 28, 2007
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Polarization-modulating element, illumination optical apparatus, ex...
- Publication number 20060170901
- Publication date Aug 3, 2006
- Nikon Corporation
- Osamu Tanitsu
- G02 - OPTICS
Information Patent Application
Projection optical system, exposure apparatus, and device productio...
- Publication number 20040009415
- Publication date Jan 15, 2004
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
Projection optical system, a projection exposure apparatus provided...
- Publication number 20030210385
- Publication date Nov 13, 2003
- NIKON CORPORATION
- Koji Shigematsu
- G02 - OPTICS
Information Patent Application
Projection optical system, a projection exposure apparatus, and a p...
- Publication number 20030007138
- Publication date Jan 9, 2003
- Nikon Corporation
- Koji Shigematsu
- G02 - OPTICS

Koji Shigematsu

Person

Patents Grantslast 30 patents

Illumination optical system, exposure apparatus and device manufact...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination optical system, exposure apparatus and device manufact...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination optical system, exposure apparatus and device manufact...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

Lighting optical device, regulation method for lighting optical dev...

Polarization-modulating element, illumination optical apparatus, ex...

Illumination optical system, exposure apparatus and device manufact...

Illuminating optical apparatus, exposure apparatus and device manuf...

Lighting optical device, exposure system, and exposure method

Projection optical system, exposure apparatus, and device productio...

Projection optical system, a projection exposure apparatus provided...

Projection optical system, a projection exposure apparatus, and a p...

Projection optical system and exposure apparatus and method

Exposure apparatus, a photolithography method, and a device manufac...

Projection optical system and exposure apparatus and method

Projection optical system and exposure apparatus and method

Exposure apparatus

Information storage apparatus and method for operating the same

Information storage apparatus and method for operating the same

Patents Applicationslast 30 patents

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVIC...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EX...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...

Polarization-modulating element, illumination optical apparatus, ex...

Polarization-modulating element, illumination optical apparatus, ex...

ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...

Exposure apparatus, device manufacturing method and exposure method

Lighting Optical Device, Regulation Method for Lighting Optical Dev...

Lighting Optical Device,Exposure System,And Exposure Method

Method of adjusting lighting optical device, lighting optical devic...

Polarization-modulating element, illumination optical apparatus, ex...

Projection optical system, exposure apparatus, and device productio...

Projection optical system, a projection exposure apparatus provided...

Projection optical system, a projection exposure apparatus, and a p...