Koji TAKEYA

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,734,242
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Kazuaki Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Naturally oxidized film removing method and naturally oxidized film...
- Patent number 10,460,946
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Jun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method
- Patent number 10,312,079
- Issue date Jun 4, 2019
- Tokyo Electron Limited
- Koji Takeya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and etching apparatus
- Patent number 9,991,138
- Issue date Jun 5, 2018
- Tokyo Electron Limited
- Jun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and storage medium
- Patent number 9,607,855
- Issue date Mar 28, 2017
- Tokyo Electron Limited
- Nobuhiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,554,095
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,550,739
- Issue date Jun 23, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,521,687
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220068657
- Publication date Mar 3, 2022
- Tokyo Electron Limited
- Koji TAKEYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-CONTAINING FILM ETCHING METHOD, COMPUTER-READABLE STORAGE M...
- Publication number 20190181056
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NATURALLY OXIDIZED FILM REMOVING METHOD AND NATURALLY OXIDIZED FILM...
- Publication number 20180211844
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Jun LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180197748
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Kazuaki NISHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD
- Publication number 20170309478
- Publication date Oct 26, 2017
- TOKYO ELECTRON LIMITED
- Koji TAKEYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20170032990
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Jun LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND STORAGE MEDIUM
- Publication number 20160225637
- Publication date Aug 4, 2016
- TOKYO ELECTRON LIMITED
- Nobuhiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...
- Publication number 20090008579
- Publication date Jan 8, 2009
- TOKYO ELECTRON LIMITED
- Koji TAKEYA
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080067429
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080062608
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228285
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228275
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY

Koji TAKEYA

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Naturally oxidized film removing method and naturally oxidized film...

Etching method

Etching method and etching apparatus

Etching method and storage medium

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Patents Applicationslast 30 patents

ETCHING METHOD AND ETCHING APPARATUS

SILICON-CONTAINING FILM ETCHING METHOD, COMPUTER-READABLE STORAGE M...

NATURALLY OXIDIZED FILM REMOVING METHOD AND NATURALLY OXIDIZED FILM...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ETCHING METHOD

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND STORAGE MEDIUM

ELECTRON BEAM LITHOGRAPHY APPARATUS AND DESIGN METHOD OF PATTERNED...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...