Koji Tange

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Cleaning process for photomasks
- Patent number 7,001,470
- Issue date Feb 21, 2006
- Renesas Technology Corp.
- Koji Tange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern writing method employing electron beam writing device of va...
- Patent number 6,639,232
- Issue date Oct 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Koji Tange
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing process, process for forming pattern and process for pre...
- Patent number 6,511,792
- Issue date Jan 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Atsuko Fujino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography mask having monitoring marks and manufacturing met...
- Patent number 6,338,923
- Issue date Jan 15, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Koji Tange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Cleaning process for photomasks
- Publication number 20050274392
- Publication date Dec 15, 2005
- Renesas Technology Corp.
- Koji Tange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Phase shift mask and method of producing the same
- Publication number 20050255389
- Publication date Nov 17, 2005
- Renesas Technology Corp.
- Koji Tange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern writing method capable of preventing or reducing an error b...
- Publication number 20040153989
- Publication date Aug 5, 2004
- Renesas Technology Corp.
- Koji Tange
- B82 - NANO-TECHNOLOGY
Information Patent Application
Cleaning process for photomasks
- Publication number 20020155360
- Publication date Oct 24, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Koji Tange
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing process, process for forming pattern and process for pre...
- Publication number 20010018166
- Publication date Aug 30, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Atsuko Fujino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY