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Koji Tometsuka
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Tokyo, JP
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last 30 patents
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Patent Grant
Wafer transfer mechanism in vertical CVD diffusion apparatus
Patent number
5,217,340
Issue date
Jun 8, 1993
Kokusai Electric Co., Ltd.
Yasuhiro Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer transfer method in vertical CVD diffusion apparatus
Patent number
5,112,641
Issue date
May 12, 1992
Kokusai Electric Co., Ltd.
Yasuhiro Harada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...