Claims
- 1. A wafer transfer mechanism for use with a vertical CVD diffusion apparatus comprising:
- a wafer chuck provided with plural vertically superimposed chuck plates, each chuck plate including an independent vacuum means for gripping a wafer;
- a rotatable slide mechanism, including means for moving said wafer chuck along a radial direction;
- means for rotating said slide mechanism;
- a transfer elevator for moving vertically along said slide mechanism;
- a diffusion furnace arranged at one side of said transfer elevator;
- a cassette stocker configured at another side of said transfer elevator, and adapted to receive a plurality of wafer holding cassettes, and wherein said cassette stocker has at least one cassette stocking rack having multiple rows and multiple shelves and wherein said cassette stocking rack can move horizontally;
- means for moving the cassette stocker horizontally; and
- means for connecting the plural vertically superimposed chuck plates to a vacuum source including independently actuable magnetic valves provided correspondingly for each respective chuck plate.
Priority Claims (1)
Number |
Date |
Country |
Kind |
1-19230 |
Jan 1989 |
JPX |
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Parent Case Info
This is a continuation of copending application Ser. No. 07/638,547 filed on Jan. 8, 1991 and now abandoned, which is a divisional application of Ser. No. 07/466,973, filed on Jan. 18, 1990 now issued as U.S. Pat. No. 5,112,641.
US Referenced Citations (11)
Foreign Referenced Citations (3)
Number |
Date |
Country |
60-262702 |
Dec 1985 |
JPX |
61-291335 |
Dec 1986 |
JPX |
62-140735 |
Jun 1987 |
JPX |
Non-Patent Literature Citations (1)
Entry |
IBM Technical Disclosure Bulletin, Wagler et al., vol. 14, #12, May 1972, pp. 3678-3679. |
Divisions (1)
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Number |
Date |
Country |
Parent |
466973 |
Jan 1990 |
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Continuations (1)
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Number |
Date |
Country |
Parent |
638547 |
Jan 1991 |
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