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Koji Uda

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  • Yokohama, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate conveying device and method of controlling the same
    • Patent number 5,641,264
    • Issue date Jun 24, 1997
    • Canon Kabushiki Kaisha
    • Mitsutoshi Kuno
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure method
    • Patent number 5,610,965
    • Issue date Mar 11, 1997
    • Canon Kabushiki Kaisha
    • Makiko Mori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Temperature controlling device for mask and wafer holders
    • Patent number 5,577,552
    • Issue date Nov 26, 1996
    • Canon Kabushiki Kaisha
    • Ryuichi Ebinuma
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Light quantity controlling apparatus
    • Patent number 5,459,573
    • Issue date Oct 17, 1995
    • Canon Kabushiki Kaisha
    • Naoto Abe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,377,251
    • Issue date Dec 27, 1994
    • Canon Kabushiki Kaisha
    • Nobutoshi Mizusawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Wafer table and exposure apparatus with the same
    • Patent number 5,231,291
    • Issue date Jul 27, 1993
    • Canon Kabushiki Kaisha
    • Mitsuaki Amemiya
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Conveying apparatus and method of controlling the same
    • Patent number 5,226,523
    • Issue date Jul 13, 1993
    • Canon Kabushiki Kaisha
    • Eigo Kawakami
    • G05 - CONTROLLING REGULATING
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,182,615
    • Issue date Jan 26, 1993
    • Canon Kabushiki Kaisha
    • Hiroshi Kurosawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,172,402
    • Issue date Dec 15, 1992
    • Canon Kabushiki Kaisha
    • Nobutoshi Mizusawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus for controlling intensity of exposure radiation
    • Patent number 5,157,700
    • Issue date Oct 20, 1992
    • Canon Kabushiki Kaisha
    • Hiroshi Kurosawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus
    • Patent number 5,138,643
    • Issue date Aug 11, 1992
    • Canon Kabushiki Kaisha
    • Eiji Sakamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment system
    • Patent number 5,112,133
    • Issue date May 12, 1992
    • Canon Kabushiki Kaisha
    • Hiroshi Kurosawa
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Liquid cooled X-ray lithographic exposure apparatus
    • Patent number 5,063,582
    • Issue date Nov 5, 1991
    • Canon Kabushiki Kaisha
    • Tetsuzo Mori
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    An alignment system for align first and second objects using alignm...
    • Patent number 5,028,797
    • Issue date Jul 2, 1991
    • Canon Kabushiki Kaisha
    • Naoto Abe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Exposure apparatus and control of the same
    • Patent number 5,008,703
    • Issue date Apr 16, 1991
    • Canon Kabushiki Kaisha
    • Eigo Kawakami
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Alignment and exposure apparatus
    • Patent number 4,669,867
    • Issue date Jun 2, 1987
    • Canon Kabushiki Kaisha
    • Koji Uda
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY