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last 30 patents
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Patent Grant
Method for bonding wafers, and a wafer
Patent number
12,202,725
Issue date
Jan 21, 2025
Murata Manufacturing Co., Ltd.
Konsta Hannula
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
MEMS DEVICE WITH A CAP LAYER HAVING GAPS AND METHOD OF MANUFACTURIN...
Publication number
20240409398
Publication date
Dec 12, 2024
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR BONDING WAFERS, AND A WAFER
Publication number
20220289567
Publication date
Sep 15, 2022
Murata Manufacturing Co., Ltd.
Konsta HANNULA
B81 - MICRO-STRUCTURAL TECHNOLOGY