Konstantin Nikolavich Koshelev

Person

Moscow, RU

People

Patents Grantslast 30 patents

Information Patent Grant
High-brightness laser produced plasma source and method of generati...
- Patent number 12,028,958
- Issue date Jul 2, 2024
- Isteq B.V.
- Samir Ellwi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
X-ray source with rotating liquid-metal target
- Patent number 11,869,742
- Issue date Jan 9, 2024
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Short-wavelength radiation source with multisectional collector mod...
- Patent number 11,252,810
- Issue date Feb 15, 2022
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High brightness laser-produced plasma light source
- Patent number 10,887,973
- Issue date Jan 5, 2021
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-brightness laser produced plasma source and methods for genera...
- Patent number 10,638,588
- Issue date Apr 28, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High brightness short-wavelength radiation source (variants)
- Patent number 10,588,210
- Issue date Mar 10, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,368,337
- Issue date Jun 14, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source with laser pumping and method for generating radiation
- Patent number 9,357,627
- Issue date May 31, 2016
- OOO “RnD-ISAN”
- Pavel Stanislavovich Antsiferov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus
- Patent number 9,307,624
- Issue date Apr 5, 2016
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,493,548
- Issue date Jul 23, 2013
- ASML Netherlands B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma radiation source, method of forming plasma radiation, appara...
- Patent number 8,362,444
- Issue date Jan 29, 2013
- ASML Netherlands B.V.
- Vladimir Vitalevitch Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus comprising an electrical discharge generator...
- Patent number 8,317,929
- Issue date Nov 27, 2012
- ASML Netherlands B.V.
- Tatyana Victorovna Rakhimova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 8,294,128
- Issue date Oct 23, 2012
- ASML Netherlands B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus, radiation system and device manufacturing m...
- Patent number 8,018,574
- Issue date Sep 13, 2011
- ASML Netherlands B.V.
- Robert Rafilevitch Gayazov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,872,244
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma radiation source, method of forming plasma radiation, appara...
- Patent number 7,838,853
- Issue date Nov 23, 2010
- ASML Netherlands B.V.
- Vladimir Vitalevitch Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 7,825,390
- Issue date Nov 2, 2010
- ASML Netherlands B.V.
- Vladimir Mihallovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Assembly for blocking a beam of radiation and method of blocking a...
- Patent number 7,772,570
- Issue date Aug 10, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source, lithographic apparatus, device manufacturing meth...
- Patent number RE41362
- Issue date Jun 1, 2010
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- 250 - Radiant energy
Information Patent Grant
Radiation system and lithographic apparatus
- Patent number 7,696,492
- Issue date Apr 13, 2010
- ASML Netherlands B.V.
- Arnoud Cornelis Wassink
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation system and lithographic apparatus
- Patent number 7,696,493
- Issue date Apr 13, 2010
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
- Patent number 7,528,395
- Issue date May 5, 2009
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Reducing fast ions in a plasma radiation source
- Patent number 7,518,135
- Issue date Apr 14, 2009
- ASML Netherlands B.V.
- Vladimir Vital'evich Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma radiation source for a lithographic apparatus
- Patent number 7,518,134
- Issue date Apr 14, 2009
- ASML Netherlands B.V.
- Vladimir Vitalevitch Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source
- Patent number 7,501,642
- Issue date Mar 10, 2009
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electromagnetic radiation source, lithographic apparatus, device ma...
- Patent number 7,462,851
- Issue date Dec 9, 2008
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
- Patent number 7,335,900
- Issue date Feb 26, 2008
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,279,690
- Issue date Oct 9, 2007
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Radiation generating device, lithographic apparatus, device manufac...
- Patent number 7,208,746
- Issue date Apr 24, 2007
- ASML Netherlands B.V.
- Konstantin Nikolaevitch Koshelev
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...
- Publication number 20240121878
- Publication date Apr 11, 2024
- ISTEQ GROUP HOLDING B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
- Publication number 20220310351
- Publication date Sep 29, 2022
- EUV LABS, LTD
- Aleksandr Yurievich VINOKHODOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATI...
- Publication number 20220132647
- Publication date Apr 28, 2022
- Isteq B.V.
- Samir ELLWI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...
- Publication number 20210092824
- Publication date Mar 25, 2021
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE
- Publication number 20200163197
- Publication date May 21, 2020
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)
- Publication number 20200060014
- Publication date Feb 20, 2020
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...
- Publication number 20190166679
- Publication date May 30, 2019
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20160044774
- Publication date Feb 11, 2016
- Pavel Stanislavovich ANTSIFEROV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
- Publication number 20150311058
- Publication date Oct 29, 2015
- RND-ISAN, LTD
- Pavel Stanislavovich ANTSIFEROV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130287968
- Publication date Oct 31, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- B82 - NANO-TECHNOLOGY
Information Patent Application
EUV Radiation Source and EUV Radiation Generation Method
- Publication number 20130015373
- Publication date Jan 17, 2013
- ASML Netherlands B.V.
- Andrei Mikhailovich Yakunin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...
- Publication number 20110043777
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitc Krivtsun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...
- Publication number 20110037960
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA RADIATION SOURCE, METHOD OF FORMING PLASMA RADIATION, APPARA...
- Publication number 20110031866
- Publication date Feb 10, 2011
- ASML NETHERLANDS B.V.
- Vladimir Vitalevitch Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...
- Publication number 20110020752
- Publication date Jan 27, 2011
- ASML NETHERLANDS B.V.
- Yurii Victorovitch Sidelnikov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET MICROSCOPE
- Publication number 20110013274
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenvich Banine
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20100141909
- Publication date Jun 10, 2010
- ASML NETHERLANDS B.V.
- Arnoud Cornelis Wassink
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20100002211
- Publication date Jan 7, 2010
- ASML NETHERLANDS B.V.
- Denis GLUSHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090040492
- Publication date Feb 12, 2009
- ASML NETHERLANDS B.V.
- Vladimir Vitalevich Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20090040491
- Publication date Feb 12, 2009
- ASML NETHERLANDS B.V.
- Vladimir Vitalevich Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet microscope
- Publication number 20080266654
- Publication date Oct 30, 2008
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Apparatus with plasma radiation source and method of forming a beam...
- Publication number 20080192218
- Publication date Aug 14, 2008
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Application
Reducing fast ions in a plasma radiation source
- Publication number 20080151205
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Vladimir Vitalevitch Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Assembly for blocking a beam of radiation and method of blocking a...
- Publication number 20080148978
- Publication date Jun 26, 2008
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma radiation source, method of forming plasma radiation, appara...
- Publication number 20080142740
- Publication date Jun 19, 2008
- ASML NETHERLANDS B.V.
- Vladimir Vitalevitch Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation system and lithographic apparatus
- Publication number 20080142736
- Publication date Jun 19, 2008
- ASML NETHERLANDS B.V.
- Arnoud Cornelis Wassink
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation system and lithographic apparatus
- Publication number 20080142741
- Publication date Jun 19, 2008
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma radiation source for a lithographic apparatus
- Publication number 20080137050
- Publication date Jun 12, 2008
- ASML NETHERLANDS B.V.
- Vladimir Vitalevitch Ivanov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation source
- Publication number 20070152175
- Publication date Jul 5, 2007
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electromagnetic radiation source, lithographic apparatus, device ma...
- Publication number 20070069159
- Publication date Mar 29, 2007
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Konstantin Nikolavich Koshelev

Person

Patents Grantslast 30 patents

High-brightness laser produced plasma source and method of generati...

X-ray source with rotating liquid-metal target

Short-wavelength radiation source with multisectional collector mod...

High brightness laser-produced plasma light source

High-brightness laser produced plasma source and methods for genera...

High brightness short-wavelength radiation source (variants)

High-brightness LPP EUV light source

Light source with laser pumping and method for generating radiation

Light source with laser pumping and method for generating radiation

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Plasma radiation source, method of forming plasma radiation, appara...

Lithographic apparatus comprising an electrical discharge generator...

Apparatus with plasma radiation source and method of forming a beam...

Lithographic apparatus, radiation system and device manufacturing m...

Lithographic apparatus and device manufacturing method

Plasma radiation source, method of forming plasma radiation, appara...

Apparatus with plasma radiation source and method of forming a beam...

Assembly for blocking a beam of radiation and method of blocking a...

Radiation source, lithographic apparatus, device manufacturing meth...

Radiation system and lithographic apparatus

Radiation system and lithographic apparatus

Radiation source, lithographic apparatus and device manufacturing m...

Reducing fast ions in a plasma radiation source

Plasma radiation source for a lithographic apparatus

Radiation source

Electromagnetic radiation source, lithographic apparatus, device ma...

Radiation generating device, lithographic apparatus, device manufac...

Lithographic apparatus and device manufacturing method

Radiation generating device, lithographic apparatus, device manufac...

Patents Applicationslast 30 patents

HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...

X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET

HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATI...

SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...

HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE

HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)

HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

EUV Radiation Source and EUV Radiation Generation Method

TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...

PLASMA RADIATION SOURCE, METHOD OF FORMING PLASMA RADIATION, APPARA...

EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD FOR PRODUCING EXTRE...

EXTREME ULTRAVIOLET MICROSCOPE

RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Extreme ultraviolet microscope

Apparatus with plasma radiation source and method of forming a beam...

Reducing fast ions in a plasma radiation source

Assembly for blocking a beam of radiation and method of blocking a...

Plasma radiation source, method of forming plasma radiation, appara...

Radiation system and lithographic apparatus

Radiation system and lithographic apparatus

Plasma radiation source for a lithographic apparatus

Radiation source

Electromagnetic radiation source, lithographic apparatus, device ma...