Koos VAN BERKEL

Person

Waalre, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Object holder, tool and method of manufacturing an object holder
- Patent number 12,197,139
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Bastiaan Lambertus Wilhelmus Marinus Van De Ven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multilayer reflector, method of manufacturing a multilayer reflecto...
- Patent number 10,955,595
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Koos Van Berkel
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus
- Patent number 10,747,127
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Frits Van Der Meulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a property of a structure, inspection apparat...
- Patent number 10,712,673
- Issue date Jul 14, 2020
- ASML Netherlands B.V.
- Sietse Thijmen Van Der Post
- G01 - MEASURING TESTING
Information Patent Grant
Method of optimizing the position and/or size of a measurement illu...
- Patent number 10,488,765
- Issue date Nov 26, 2019
- ASML Netherlands B.V.
- Johan Maria Van Boxmeer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 10,185,224
- Issue date Jan 22, 2019
- ASML Netherlands B.V.
- Ferry Zijp
- G02 - OPTICS
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 9,927,722
- Issue date Mar 27, 2018
- ASML Netherlands B.V.
- Koos Van Berkel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspection and metrology
- Patent number 9,811,001
- Issue date Nov 7, 2017
- ASML Netherlands B.V.
- Peter Danny Van Voorst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM
- Publication number 20240077380
- Publication date Mar 7, 2024
- ASML NETHERLANDS B.V.
- Marinus Maria Johannes VAN DE WAL
- G01 - MEASURING TESTING
Information Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
- Publication number 20230384694
- Publication date Nov 30, 2023
- ASML NETHERLANDS B.V.
- Abdullah ALIKHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOTION CONTROL USING AN ARTIFICIAL NEURAL NETWORK
- Publication number 20230315027
- Publication date Oct 5, 2023
- ASML NETHERLANDS B.V.
- Koos VAN BERKEL
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
A METHOD AND APPARATUS FOR CALCULATING A SPATIAL MAP ASSOCIATED WIT...
- Publication number 20230273527
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Mauritius Gerardus Elisabeth SCHNEIDERS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR ADJUSTING A PATTERNING PROCESS
- Publication number 20230273529
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Satej Subhash KHEDEKAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...
- Publication number 20230236518
- Publication date Jul 27, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AN...
- Publication number 20230229090
- Publication date Jul 20, 2023
- ASML NETHERLANDS B.V.
- Victor Sebastiaan Dolk
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM
- Publication number 20230176492
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Toralf GRUNER
- G02 - OPTICS
Information Patent Application
OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER
- Publication number 20230105002
- Publication date Apr 6, 2023
- ASML NETHERLANDS B.V.
- Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING A PROPERTY OF A STRUCTURE, INSPECTION APPARAT...
- Publication number 20190361360
- Publication date Nov 28, 2019
- ASML NETHERLANDS B.V.
- Sietse Thijmen VAN DER POST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus
- Publication number 20190227445
- Publication date Jul 25, 2019
- ASML NETHERLANDS B.V.
- Frits VAN DER MEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Optimizing the Position and/or Size of a Measurement Illu...
- Publication number 20190107786
- Publication date Apr 11, 2019
- ASML NETHERLANDS B.V.
- Johan Maria VAN BOXMEER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Multilayer Reflector, Method of Manufacturing a Multilayer Reflecto...
- Publication number 20190033499
- Publication date Jan 31, 2019
- ASML NETHERLANDS B.V.
- Koos VAN BERKEL
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20180120714
- Publication date May 3, 2018
- ASML NETHERLANDS B.V.
- Ferry Zijp
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20160266503
- Publication date Sep 15, 2016
- ASML NETHERLANDS B.V.
- Peter Danny Van Voorst
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION AND METROLOGY
- Publication number 20160246189
- Publication date Aug 25, 2016
- ASML NETHERLANDS B.V.
- Koos VAN BERKEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Koos VAN BERKEL

Person

Patents Grantslast 30 patents

Object holder, tool and method of manufacturing an object holder

Multilayer reflector, method of manufacturing a multilayer reflecto...

Lithographic apparatus

Method of determining a property of a structure, inspection apparat...

Method of optimizing the position and/or size of a measurement illu...

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Method and apparatus for inspection and metrology

Patents Applicationslast 30 patents

A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM

VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...

MOTION CONTROL USING AN ARTIFICIAL NEURAL NETWORK

A METHOD AND APPARATUS FOR CALCULATING A SPATIAL MAP ASSOCIATED WIT...

METHOD FOR ADJUSTING A PATTERNING PROCESS

OBJECT HOLDER, ELECTROSTATIC SHEET AND METHOD FOR MAKING AN ELECTRO...

METHOD FOR THERMO-MECHANICAL CONTROL OF A HEAT SENSITIVE ELEMENT AN...

OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM

OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER

METHOD OF DETERMINING A PROPERTY OF A STRUCTURE, INSPECTION APPARAT...

Lithographic Apparatus

Method of Optimizing the Position and/or Size of a Measurement Illu...

Multilayer Reflector, Method of Manufacturing a Multilayer Reflecto...

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

METHOD AND APPARATUS FOR INSPECTION AND METROLOGY