Kouichi Tanoue

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for scrubbing and cleaning substrate
- Patent number 5,518,552
- Issue date May 21, 1996
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS
Information Patent Grant
Device and method for scrubbing and cleaning substrate
- Patent number 5,345,639
- Issue date Sep 13, 1994
- Tokyo Electron Limited
- Kouichi Tanoue
- G02 - OPTICS