Kouji Kato

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Nagoya, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate for use in wafer attracting apparatus and manufacturing m...
- Patent number 6,491,571
- Issue date Dec 10, 2002
- NGK Insulators, Ltd.
- Masashi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate for use in wafer attracting apparatus and manufacturing m...
- Patent number 6,166,432
- Issue date Dec 26, 2000
- NGK Insulators, Ltd.
- Masashi Ohno
- H01 - BASIC ELECTRIC ELEMENTS