Number | Date | Country | Kind |
---|---|---|---|
9-067478 | Mar 1997 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
5514243 | Matsuda et al. | May 1996 | |
5600530 | Smith | Feb 1997 | |
5715132 | Steger et al. | Feb 1998 | |
5846595 | Sun et al. | Dec 1998 | |
5880924 | Kumar et al. | Mar 1999 | |
6001760 | Katsuda | Dec 1999 |
Number | Date | Country |
---|---|---|
0 806 798 A2 | Nov 1997 | EPX |
7-246336 | Sep 1995 | JPX |
8-055900 | Feb 1996 | JPX |
Entry |
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Patents Abstracts of Japan, vol. 1997, No. 12, Dec. 25, 1997 & JP 09 213774 A, Aug. 15, 1997 Abstract. |
Patent Abstract of Japan, vol. 1996, No. 03, Mar. 29, 1996 & JP 07 297265 A, Nov. 10, 1995. |
"Low voltage and High Speed Operating Electrostatic Wafer Chuck Using Sputtered Tantallian Oxide membrane", Mamoru Nakasuji et al., Journal of vacuum Science and Technology: Part A, US American Institute of Physics, N.Y., vol. 12, No. 5, pp. 2834-2839. |