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Kouki Suzuki
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate holder and film forming apparatus
Patent number
11,396,704
Issue date
Jul 26, 2022
Tokyo Electron Limited
Toshiaki Fujisato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chamber block
Patent number
D678228
Issue date
Mar 19, 2013
Tokyo Electron Limited
Kouki Suzuki
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Liner for plasma processing apparatus
Patent number
D658692
Issue date
May 1, 2012
Tokyo Electron Limited
Kouki Suzuki
D15 - Machines not elsewhere specified
Information
Patent Grant
Liner for plasma processing apparatus
Patent number
D658691
Issue date
May 1, 2012
Tokyo Electron Limited
Kouki Suzuki
D15 - Machines not elsewhere specified
Information
Patent Grant
Liner for plasma processing apparatus
Patent number
D658693
Issue date
May 1, 2012
Tokyo Electron Limited
Kouki Suzuki
D15 - Machines not elsewhere specified
Information
Patent Grant
Substrate processing apparatus and substrate rotating device
Patent number
7,842,229
Issue date
Nov 30, 2010
Tokyo Electron Limited
Sumi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus
Patent number
7,769,279
Issue date
Aug 3, 2010
Tokyo Electron Limited
Sumi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for suppressing charging of component in vacuum processing c...
Patent number
7,592,261
Issue date
Sep 22, 2009
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus
Patent number
7,250,094
Issue date
Jul 31, 2007
Tokyo Electron Limited
Sumi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Substrate Holder and Film Forming Apparatus
Publication number
20200165723
Publication date
May 28, 2020
TOKYO ELECTRON LIMITED
Toshiaki FUJISATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Substrate Rotating Device
Publication number
20080042328
Publication date
Feb 21, 2008
Sumi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT-TREATING APPARATUS
Publication number
20080011734
Publication date
Jan 17, 2008
TOKYO ELECTRON LIMITED
Sumi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heat-treating apparatus
Publication number
20060124060
Publication date
Jun 15, 2006
TOKYO ELECTRON LIMITED
Sumi Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for suppressing charging of component in vacuum processing c...
Publication number
20050146277
Publication date
Jul 7, 2005
TOKYO ELECTRON LIMITED
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS