Kuniaki YAMAGUCHI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,731,240
- Issue date Aug 22, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,192,216
- Issue date Dec 7, 2021
- Ebara Corporation
- Hiromitsu Watanabe
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate transport system, substrate processing apparatus, hand po...
- Patent number 10,818,531
- Issue date Oct 27, 2020
- Ebara Corporation
- Kuniaki Yamaguchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Polishing-amount simulation method for buffing, and buffing apparatus
- Patent number 10,792,782
- Issue date Oct 6, 2020
- Ebara Corporation
- Kuniaki Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 10,618,140
- Issue date Apr 14, 2020
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,201,888
- Issue date Feb 12, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B08 - CLEANING
Information Patent Grant
Buffing apparatus, and substrate processing apparatus
- Patent number 10,183,374
- Issue date Jan 22, 2019
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Buffing apparatus and substrate processing apparatus
- Patent number 10,131,030
- Issue date Nov 20, 2018
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Dresser disk
- Patent number D795315
- Issue date Aug 22, 2017
- Ebara Corporation
- Mitsuru Miyazaki
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate processing apparatus
- Patent number 9,700,988
- Issue date Jul 11, 2017
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Method of adjusting profile of a polishing member used in a polishi...
- Patent number 9,156,130
- Issue date Oct 13, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Method of obtaining a sliding distance distribution of a dresser on...
- Patent number 9,108,292
- Issue date Aug 18, 2015
- Ebara Corporation
- Takahiro Shimano
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 9,067,296
- Issue date Jun 30, 2015
- Ebara Corporation
- Katsutoshi Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 8,592,313
- Issue date Nov 26, 2013
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus, and program for controlli...
- Patent number 8,332,064
- Issue date Dec 11, 2012
- Ebara Corporation
- Tsuneo Torikoshi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 7,989,348
- Issue date Aug 2, 2011
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus and polishing apparatus
- Patent number 6,609,962
- Issue date Aug 26, 2003
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Dressing apparatus
- Patent number 6,602,119
- Issue date Aug 5, 2003
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Drainage structure in polishing plant
- Patent number 6,428,400
- Issue date Aug 6, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,409,582
- Issue date Jun 25, 2002
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 6,379,229
- Issue date Apr 30, 2002
- Ebara Corporation
- Satoshi Wakabayashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing device
- Patent number 6,338,669
- Issue date Jan 15, 2002
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,227,954
- Issue date May 8, 2001
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Drainage structure in polishing plant and method of polishing using...
- Patent number 6,116,986
- Issue date Sep 12, 2000
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,050,884
- Issue date Apr 18, 2000
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Polishing apparatus
- Patent number 6,042,455
- Issue date Mar 28, 2000
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Robotic transport apparatus
- Patent number 5,961,380
- Issue date Oct 5, 1999
- Tetsuji Togawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID SUPPLY DEVICE AND POLISHING DEVICE
- Publication number 20240308028
- Publication date Sep 19, 2024
- EBARA CORPORATION
- Noriyuki SATO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHI...
- Publication number 20240286246
- Publication date Aug 29, 2024
- EBARA CORPORATION
- Masayuki TAMURA
- B24 - GRINDING POLISHING
Information Patent Application
WASHING APPARATUS
- Publication number 20240269720
- Publication date Aug 15, 2024
- EBARA CORPORATION
- DAICHI KONDO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230405762
- Publication date Dec 21, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR POLISHING AND METHOD OF POLISHING
- Publication number 20230381916
- Publication date Nov 30, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230352326
- Publication date Nov 2, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
PUSHER, TRANSFER DEVICE, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230226662
- Publication date Jul 20, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID FEEDER AND POLISHING APPARATUS
- Publication number 20230001539
- Publication date Jan 5, 2023
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS
- Publication number 20210023672
- Publication date Jan 28, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210013071
- Publication date Jan 14, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND PO...
- Publication number 20190164796
- Publication date May 30, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190118338
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20180169831
- Publication date Jun 21, 2018
- EBARA CORPORATION
- Hiromitsu WATANABE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170372893
- Publication date Dec 28, 2017
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170252895
- Publication date Sep 7, 2017
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS
- Publication number 20170216991
- Publication date Aug 3, 2017
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20170066101
- Publication date Mar 9, 2017
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BUFFING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160101498
- Publication date Apr 14, 2016
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20160099156
- Publication date Apr 7, 2016
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING MODULE, PROCESSING APPARATUS, AND PROCESSING METHOD
- Publication number 20160074988
- Publication date Mar 17, 2016
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160059380
- Publication date Mar 3, 2016
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B08 - CLEANING
Information Patent Application
BUFFING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20160059376
- Publication date Mar 3, 2016
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20150140907
- Publication date May 21, 2015
- EBARA CORPORATION
- Hiromitsu WATANABE
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...
- Publication number 20140342642
- Publication date Nov 20, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...
- Publication number 20140287653
- Publication date Sep 25, 2014
- Takahiro SHIMANO
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD
- Publication number 20120276816
- Publication date Nov 1, 2012
- Katsutoshi Ono
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20110250824
- Publication date Oct 13, 2011
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing method and polishing apparatus, and program for controlli...
- Publication number 20090264052
- Publication date Oct 22, 2009
- Tsuneo Torikoshi
- B24 - GRINDING POLISHING

Kuniaki YAMAGUCHI

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Substrate processing apparatus

Polishing method and polishing apparatus

Substrate transport system, substrate processing apparatus, hand po...

Polishing-amount simulation method for buffing, and buffing apparatus

Substrate processing apparatus

Substrate processing system and substrate processing method

Cleaning apparatus and substrate processing apparatus

Substrate processing apparatus

Buffing apparatus, and substrate processing apparatus

Buffing apparatus and substrate processing apparatus

Dresser disk

Substrate processing apparatus

Method of adjusting profile of a polishing member used in a polishi...

Method of obtaining a sliding distance distribution of a dresser on...

Polishing method

Polishing method and polishing apparatus

Polishing method and polishing apparatus, and program for controlli...

Polishing method and polishing apparatus

Dressing apparatus and polishing apparatus

Dressing apparatus

Drainage structure in polishing plant

Polishing apparatus

Polishing apparatus

Polishing device

Polishing apparatus

Drainage structure in polishing plant and method of polishing using...

Polishing apparatus

Polishing apparatus

Robotic transport apparatus

Patents Applicationslast 30 patents

LIQUID SUPPLY DEVICE AND POLISHING DEVICE

METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHI...

WASHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR POLISHING AND METHOD OF POLISHING

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

PUSHER, TRANSFER DEVICE, AND SUBSTRATE PROCESSING APPARATUS

LIQUID FEEDER AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND PO...

SUBSTRATE PROCESSING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

POLISHING-AMOUNT SIMULATION METHOD FOR BUFFING, AND BUFFING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

BUFFING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND PROCESSING METHOD

PROCESSING MODULE, PROCESSING APPARATUS, AND PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

BUFFING APPARATUS, AND SUBSTRATE PROCESSING APPARATUS

POLISHING METHOD AND POLISHING APPARATUS

METHOD OF OBTAINING A SLIDING DISTANCE DISTRIBUTION OF A DRESSER ON...

METHOD OF ADJUSTING PROFILE OF A POLISHING MEMBER USED IN A POLISHI...

POLISHING METHOD

POLISHING METHOD AND POLISHING APPARATUS

Polishing method and polishing apparatus, and program for controlli...