Kuntack Lee

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate heating apparatus and method for processing a substrate
- Patent number 12,225,634
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Taehong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for drying wafer and method for drying wafer
- Patent number 12,216,408
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,211,716
- Issue date Jan 28, 2025
- Semes Co., Ltd.
- Jaeseong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 12,198,923
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Hae-Won Choi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Substrate processing method, micropattern forming method, and subst...
- Patent number 12,057,323
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Conditioner, chemical mechanical polishing apparatus including the...
- Patent number 11,964,357
- Issue date Apr 23, 2024
- Samsung Electronics Co., Ltd.
- Seungchul Han
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for processing a substrate
- Patent number 11,935,772
- Issue date Mar 19, 2024
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring unit, substrate processing apparatus, and su...
- Patent number 11,881,426
- Issue date Jan 23, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus including light source supplying light to wafer and windo...
- Patent number 11,798,801
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Hunjae Jang
- B08 - CLEANING
Information Patent Grant
Substrate-cleaning apparatus having tiltable roll brush
- Patent number 11,654,458
- Issue date May 23, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Lee
- B08 - CLEANING
Information Patent Grant
Thin film formation apparatus and method using plasma
- Patent number 11,646,203
- Issue date May 9, 2023
- Samsung Electronics Co., Ltd.
- Junyeong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, semiconductor manufacturing equipme...
- Patent number 11,640,115
- Issue date May 2, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process chamber and substrate processing apparatus including the same
- Patent number 11,610,788
- Issue date Mar 21, 2023
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary body module and chemical mechanical polishing apparatus havi...
- Patent number 11,590,628
- Issue date Feb 28, 2023
- Samsung Electronics Co., Ltd.
- Yonghee Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus including light source supplying light to wafer and windo...
- Patent number 11,482,410
- Issue date Oct 25, 2022
- Samsung Electronics Co., Ltd.
- Hunjae Jang
- B08 - CLEANING
Information Patent Grant
Conditioner, chemical mechanical polishing apparatus including the...
- Patent number 11,471,996
- Issue date Oct 18, 2022
- Samsung Electronics Co., Ltd.
- Seungchul Han
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method using th...
- Patent number 11,342,203
- Issue date May 24, 2022
- Samsung Electronics Co., Ltd.
- Jihoon Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying method, photoresist developing method, photolithog...
- Patent number 11,189,503
- Issue date Nov 30, 2021
- Samsung Electronics Co., Ltd.
- Young-Hoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber and substrate processing apparatus including the same
- Patent number 10,991,600
- Issue date Apr 27, 2021
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate drying apparatus, facility of manufacturing semiconductor...
- Patent number 10,825,698
- Issue date Nov 3, 2020
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- B08 - CLEANING
Information Patent Grant
Apparatus and methods for treating a substrate
- Patent number 10,361,100
- Issue date Jul 23, 2019
- Samsung Electronics Co., Ltd.
- Hyosan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 10,186,427
- Issue date Jan 22, 2019
- Samsung Electronics Co., Ltd.
- Kyoung Hwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal etchant compositions and methods of fabricating a semiconduct...
- Patent number 10,155,903
- Issue date Dec 18, 2018
- Samsung Electronics Co., Ltd.
- Hyosan Lee
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Manufacturing method and fluid supply system for treating substrate
- Patent number 9,941,110
- Issue date Apr 10, 2018
- Samsung Electronics Co., Ltd.
- Jung-Min Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for purifying cleaning agent
- Patent number 9,934,959
- Issue date Apr 3, 2018
- Samsung Electronics Co., Ltd.
- Yong-Jhin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and method of treating substrate
- Patent number 9,852,921
- Issue date Dec 26, 2017
- Samsung Electronics Co., Ltd.
- Kyoung Hwan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating substrate
- Patent number 9,831,081
- Issue date Nov 28, 2017
- Samsung Electronics Co., Ltd.
- Jihoon Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and a method for treating a substrate
- Patent number 9,721,801
- Issue date Aug 1, 2017
- Samsung Electronics Co., Ltd.
- Hongjin Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Etching composition
- Patent number 9,677,002
- Issue date Jun 13, 2017
- Samsung Electronics Co., Ltd.
- Sang Won Bae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus
- Patent number 9,627,233
- Issue date Apr 18, 2017
- Samsung Electronics Co., Ltd.
- SeokHoon Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
- Publication number 20250014915
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240339334
- Publication date Oct 10, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20240280906
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240242985
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BAFFLE INSPECTION APPARATUS
- Publication number 20240192071
- Publication date Jun 13, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...
- Publication number 20240175629
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- F26 - DRYING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240178024
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20240173751
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- B08 - CLEANING
Information Patent Application
FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...
- Publication number 20240167156
- Publication date May 23, 2024
- SEMES CO., LTD.
- Hyungseok KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
- Publication number 20240170306
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240149312
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240120232
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...
- Publication number 20240069451
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240036476
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
- Publication number 20230400252
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WEIGHT MEASUREMENT APPARATUS, A SUBSTRATE PROCESSING APPA...
- Publication number 20230384681
- Publication date Nov 30, 2023
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPME...
- Publication number 20230244150
- Publication date Aug 3, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Jeong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS INCLUDING LIGHT SOURCE SUPPLYING LIGHT TO WAFER AND WINDO...
- Publication number 20230078220
- Publication date Mar 16, 2023
- SAMSUNG ELECTRONICS., LTD.
- Hunjae JANG
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20230062447
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20230046060
- Publication date Feb 16, 2023
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DRYING SUBSTRATE
- Publication number 20230010670
- Publication date Jan 12, 2023
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DRYING WAFER AND METHOD FOR DRYING WAFER
- Publication number 20230004089
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220415680
- Publication date Dec 29, 2022
- SEMES CO., LTD.
- Jaeseong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220415643
- Publication date Dec 29, 2022
- SEMES CO., LTD.
- Hae-Won CHOI
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
WAFER DRYING APPARATUS, WAFER PROCESSING SYSTEM INCLUDING THE SAME,...
- Publication number 20220406623
- Publication date Dec 22, 2022
- Samsung Electronics Co., Ltd.
- SANGJINE PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...
- Publication number 20220331931
- Publication date Oct 20, 2022
- Samsung Electronics Co., Ltd.
- Seungchul HAN
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING METHOD USING LOW TEMPERATURE DEVELOPER AND SEM...
- Publication number 20220326617
- Publication date Oct 13, 2022
- Samsung Electronics Co., Ltd.
- Sangjine Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAFER-CLEANING APPARATUS INCLUDING A WINDOW PROTECTOR AND A METHOD...
- Publication number 20220230872
- Publication date Jul 21, 2022
- Samsung Electronics Co., Ltd.
- Hunjae JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, MICROPATTERN FORMING METHOD, AND SUBST...
- Publication number 20220208558
- Publication date Jun 30, 2022
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220199440
- Publication date Jun 23, 2022
- Samsung Electronics Co., Ltd.
- Seohyun Kim
- H01 - BASIC ELECTRIC ELEMENTS

Kuntack Lee

Person

Patents Grantslast 30 patents

Substrate heating apparatus and method for processing a substrate

Apparatus for drying wafer and method for drying wafer

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing system

Substrate processing method, micropattern forming method, and subst...

Conditioner, chemical mechanical polishing apparatus including the...

Apparatus for processing a substrate

Substrate transferring unit, substrate processing apparatus, and su...

Apparatus including light source supplying light to wafer and windo...

Substrate-cleaning apparatus having tiltable roll brush

Thin film formation apparatus and method using plasma

Substrate processing apparatus, semiconductor manufacturing equipme...

Process chamber and substrate processing apparatus including the same

Rotary body module and chemical mechanical polishing apparatus havi...

Apparatus including light source supplying light to wafer and windo...

Conditioner, chemical mechanical polishing apparatus including the...

Substrate cleaning apparatus and substrate cleaning method using th...

Substrate drying method, photoresist developing method, photolithog...

Process chamber and substrate processing apparatus including the same

Substrate drying apparatus, facility of manufacturing semiconductor...

Apparatus and methods for treating a substrate

Substrate treating apparatus

Metal etchant compositions and methods of fabricating a semiconduct...

Manufacturing method and fluid supply system for treating substrate

Method and apparatus for purifying cleaning agent

Substrate treating apparatus and method of treating substrate

Method for treating substrate

Apparatus and a method for treating a substrate

Etching composition

Substrate treating apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

BAFFLE INSPECTION APPARATUS

SUBSTRATE PROCESSING BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDI...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING CHAMBER, A SUBSTRATE PROCESSING SYSTEM INCLUDING...

FLUIDIC BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE P...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...

SUBSTRATE WEIGHT MEASUREMENT APPARATUS, A SUBSTRATE PROCESSING APPA...

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR MANUFACTURING EQUIPME...

APPARATUS INCLUDING LIGHT SOURCE SUPPLYING LIGHT TO WAFER AND WINDO...

SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...

SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...

APPARATUS AND METHOD FOR DRYING SUBSTRATE

APPARATUS FOR DRYING WAFER AND METHOD FOR DRYING WAFER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

WAFER DRYING APPARATUS, WAFER PROCESSING SYSTEM INCLUDING THE SAME,...

CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE...

SUBSTRATE PROCESSING METHOD USING LOW TEMPERATURE DEVELOPER AND SEM...

WAFER-CLEANING APPARATUS INCLUDING A WINDOW PROTECTOR AND A METHOD...

SUBSTRATE PROCESSING METHOD, MICROPATTERN FORMING METHOD, AND SUBST...

APPARATUS FOR PROCESSING A SUBSTRATE