Kyeongtea BANG

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,605,529
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate processing apparatus including th...
- Patent number 11,404,252
- Issue date Aug 2, 2022
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20240266144
- Publication date Aug 8, 2024
- Samsung Electronics Co., Ltd.
- JAEWON JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220051873
- Publication date Feb 17, 2022
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210111007
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- H01 - BASIC ELECTRIC ELEMENTS