Kyo TSUBOI

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,715,630
- Issue date Aug 1, 2023
- Tokyo Electron Limited
- Yusuke Hayasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting stage, substrate processing device, and edge ring
- Patent number 11,538,668
- Issue date Dec 27, 2022
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,554,095
- Issue date Jun 30, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,550,739
- Issue date Jun 23, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Static electricity deflecting device, electron beam irradiating app...
- Patent number 7,521,687
- Issue date Apr 21, 2009
- Tokyo Electron Limited
- Takashi Fuse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, and electrode structure and table stru...
- Patent number 7,033,444
- Issue date Apr 25, 2006
- Tokyo Electron Limited
- Mitsuaki Komino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of detaching object to be processed from electrostatic chuck
- Patent number 5,956,837
- Issue date Sep 28, 1999
- Tokyo Electron Limited
- Iku Shiota
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230326724
- Publication date Oct 12, 2023
- TOKYO ELECTRON LIMITED
- Yusuke HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mounting Stage, Substrate Processing Device, and Edge Ring
- Publication number 20200194239
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20190348262
- Publication date Nov 14, 2019
- TOKYO ELECTRON LIMITED
- Yusuke HAYASAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080067429
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20080062608
- Publication date Mar 13, 2008
- TOKYO ELECTRON LIMITED
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228285
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY
Information Patent Application
STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...
- Publication number 20070228275
- Publication date Oct 4, 2007
- e-Beam Corporation
- Takashi FUSE
- B82 - NANO-TECHNOLOGY

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Mounting stage, substrate processing device, and edge ring

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Static electricity deflecting device, electron beam irradiating app...

Plasma processing apparatus, and electrode structure and table stru...

Method of detaching object to be processed from electrostatic chuck

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

Mounting Stage, Substrate Processing Device, and Edge Ring

PLASMA PROCESSING APPARATUS

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...

STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APP...