Kyoshige Katayama

Person

Kumamoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 7,205,024
- Issue date Apr 17, 2007
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas treatment apparatus
- Patent number 6,808,567
- Issue date Oct 26, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,726,775
- Issue date Apr 27, 2004
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas treatment apparatus
- Patent number 6,660,096
- Issue date Dec 9, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of coating film, coating unit, aging unit, solvent replaceme...
- Patent number 6,589,339
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Kazuhiro Takeshita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 6,524,389
- Issue date Feb 25, 2003
- Tokyo Electron Limited
- Kyoshige Katayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,354,832
- Issue date Mar 12, 2002
- Tokyo Electron Limited
- Yuta Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating apparatus including aging unit and solvent replacement...
- Patent number 6,248,168
- Issue date Jun 19, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas treatment apparatus
- Patent number 6,190,459
- Issue date Feb 20, 2001
- Tokyo Electron Limited
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20060292298
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20040156996
- Publication date Aug 12, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas treatment apparatus
- Publication number 20040045184
- Publication date Mar 11, 2004
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20030196595
- Publication date Oct 23, 2003
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of coating film, coating unit, aging unit, solvent replaceme...
- Publication number 20010017103
- Publication date Aug 30, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas treatment apparatus
- Publication number 20010000198
- Publication date Apr 12, 2001
- TOKYO ELECTRON LIMITED
- Kazuhiro Takeshita
- H01 - BASIC ELECTRIC ELEMENTS

Kyoshige Katayama

Person

Patents Grantslast 30 patents

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Spin coating apparatus including aging unit and solvent replacement...

Gas treatment apparatus

Patents Applicationslast 30 patents

Method of coating film, coating unit, aging unit, solvent replaceme...

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus

Method of coating film, coating unit, aging unit, solvent replaceme...

Method of coating film, coating unit, aging unit, solvent replaceme...

Gas treatment apparatus