Lai ZHAO

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High-K dielectric materials comprising zirconium oxide utilized in...
- Patent number 12,148,766
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition chamber system diffuser with increased power efficiency
- Patent number 12,136,538
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Changling Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Selective in-situ cleaning of high-k films from processing chamber...
- Patent number 12,076,763
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Yujia Zhai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid high-K dielectric material film stacks comprising zirconium...
- Patent number 12,080,725
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 12,021,152
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor with small storage capacitor with metal oxide...
- Patent number 11,895,872
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Jung Bae Kim
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
High-K dielectric materials comprising zirconium oxide utilized in...
- Patent number 11,894,396
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas confiner assembly for eliminating shadow frame
- Patent number 11,773,489
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid high-k dielectric material film stacks comprising zirconium...
- Patent number 11,742,362
- Issue date Aug 29, 2023
- Applied Material, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 11,670,722
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Layer stack for display applications
- Patent number 11,600,642
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 11,380,801
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-k dielectric materials comprising zirconium oxide utilized in...
- Patent number 11,239,258
- Issue date Feb 1, 2022
- Applied Materials, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid high-k dielectric material film stacks comprising zirconium...
- Patent number 11,145,683
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removal of sharp corners from diffuser plate
- Patent number 11,123,837
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Ilyoung Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor with small storage capacitor with metal oxide...
- Patent number 11,101,338
- Issue date Aug 24, 2021
- APPLIED MATERIALS, INC.
- Jung Bae Kim
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Layer stack for display applications
- Patent number 11,049,887
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Xiangxin Rui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffuser support structure for reduced particle generation
- Patent number 10,927,461
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Allen K. Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber liner
- Patent number 10,923,327
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Jianheng Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffuser mounting plate for reduced particle generation
- Patent number 10,883,174
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Allen K. Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process to reduce plasma induced damage
- Patent number 10,804,408
- Issue date Oct 13, 2020
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for improved silicon nitride passivation films
- Patent number 10,748,759
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Jianheng Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corner spoiler for improving profile uniformity
- Patent number 10,697,063
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Lai Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amorphous silicon thickness uniformity improved by process diluted...
- Patent number 9,818,606
- Issue date Nov 14, 2017
- Applied Materials, Inc.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Run-to-run stability of film deposition
- Patent number 9,299,558
- Issue date Mar 29, 2016
- Applied Materials, Inc.
- Lai Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-layer amorphous silicon structure with improved poly-silicon...
- Patent number 9,048,099
- Issue date Jun 2, 2015
- Applied Materials, Inc.
- Qunhua Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY
- Publication number 20250046578
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Changling Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BARRIER ENCAPSULATION FOR ORGANIC LIGHT-EMITTING DIODES
- Publication number 20250008823
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Zongkai WU
Information Patent Application
HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...
- Publication number 20240347551
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...
- Publication number 20240120349
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20240088301
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...
- Publication number 20230369354
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY
- Publication number 20230122134
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Changling Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20220293793
- Publication date Sep 15, 2022
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...
- Publication number 20220130873
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...
- Publication number 20220013547
- Publication date Jan 13, 2022
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR WITH SMALL STORAGE CAPACITOR WITH METAL OXIDE...
- Publication number 20210376032
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Jung Bae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER STACK FOR DISPLAY APPLICATIONS
- Publication number 20210288084
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Xiangxin RUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20200395485
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...
- Publication number 20200258918
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Xiangxin RUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR IMPROVED SILICON NITRIDE PASSIVATION FILMS
- Publication number 20200227249
- Publication date Jul 16, 2020
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DIFFUSER MOUNTING PLATE FOR REDUCED PARTICLE GENERATION
- Publication number 20200165726
- Publication date May 28, 2020
- Applied Materials, Inc.
- Allen K. LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER
- Publication number 20200098549
- Publication date Mar 26, 2020
- Applied Materials, Inc.
- Beom Soo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-K GATE INSULATOR FOR A THIN-FILM TRANSISTOR
- Publication number 20200083052
- Publication date Mar 12, 2020
- Applied Materials, Inc.
- Yujia ZHAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DIFFUSER SUPPORT STRUCTURE FOR REDUCED PARTICLE GENERATION
- Publication number 20200071833
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Allen K. LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER LINER
- Publication number 20200043706
- Publication date Feb 6, 2020
- Applied Materials, Inc.
- Jianheng LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM TRANSISTOR WITH SMALL STORAGE CAPACITOR WITH METAL OXIDE...
- Publication number 20190214447
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Jung Bae KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-K GATE INSULATOR FOR A THIN-FILM TRANSISTOR
- Publication number 20190206691
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Yujia ZHAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
- Publication number 20190193233
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Ilyoung HONG
- B24 - GRINDING POLISHING
Information Patent Application
LAYER STACK FOR DISPLAY APPLICATIONS
- Publication number 20190148416
- Publication date May 16, 2019
- Applied Materials, Inc.
- Xiangxin RUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO REDUCE PLASMA INDUCED DAMAGE
- Publication number 20190115475
- Publication date Apr 18, 2019
- Applied Materials, Inc.
- Jianheng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...
- Publication number 20180350571
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Yujia ZHAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...
- Publication number 20180345330
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Yujia ZHAI
- B08 - CLEANING
Information Patent Application
SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...
- Publication number 20180347037
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Yujia ZHAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS
- Publication number 20180340257
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Umesha ACHARY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Diffuser With Corner HCG
- Publication number 20180090300
- Publication date Mar 29, 2018
- Applied Materials, Inc.
- Lai ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

High-K dielectric materials comprising zirconium oxide utilized in...

Deposition chamber system diffuser with increased power efficiency

Selective in-situ cleaning of high-k films from processing chamber...

Hybrid high-K dielectric material film stacks comprising zirconium...

Process to reduce plasma induced damage

Thin film transistor with small storage capacitor with metal oxide...

High-K dielectric materials comprising zirconium oxide utilized in...

Gas confiner assembly for eliminating shadow frame

Hybrid high-k dielectric material film stacks comprising zirconium...

Process to reduce plasma induced damage

Layer stack for display applications

Process to reduce plasma induced damage

High-k dielectric materials comprising zirconium oxide utilized in...

Hybrid high-k dielectric material film stacks comprising zirconium...

Method of removal of sharp corners from diffuser plate

Thin film transistor with small storage capacitor with metal oxide...

Layer stack for display applications

Gas diffuser support structure for reduced particle generation

Chamber liner

Gas diffuser mounting plate for reduced particle generation

Process to reduce plasma induced damage

Methods for improved silicon nitride passivation films

Corner spoiler for improving profile uniformity

Amorphous silicon thickness uniformity improved by process diluted...

Run-to-run stability of film deposition

Multi-layer amorphous silicon structure with improved poly-silicon...

Patents Applicationslast 30 patents

DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY

BARRIER ENCAPSULATION FOR ORGANIC LIGHT-EMITTING DIODES

HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...

HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...

DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...

HYBRID HIGH-K DIELECTRIC MATERIAL FILM STACKS COMPRISING ZIRCONIUM...

THIN FILM TRANSISTOR WITH SMALL STORAGE CAPACITOR WITH METAL OXIDE...

LAYER STACK FOR DISPLAY APPLICATIONS

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

HIGH-K DIELECTRIC MATERIALS COMPRISING ZIRCONIUM OXIDE UTILIZED IN...

METHODS FOR IMPROVED SILICON NITRIDE PASSIVATION FILMS

GAS DIFFUSER MOUNTING PLATE FOR REDUCED PARTICLE GENERATION

HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER

HIGH-K GATE INSULATOR FOR A THIN-FILM TRANSISTOR

GAS DIFFUSER SUPPORT STRUCTURE FOR REDUCED PARTICLE GENERATION

CHAMBER LINER

THIN FILM TRANSISTOR WITH SMALL STORAGE CAPACITOR WITH METAL OXIDE...

HIGH-K GATE INSULATOR FOR A THIN-FILM TRANSISTOR

METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE

LAYER STACK FOR DISPLAY APPLICATIONS

PROCESS TO REDUCE PLASMA INDUCED DAMAGE

SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...

SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...

SELECTIVE IN-SITU CLEANING OF HIGH-K FILMS FROM PROCESSING CHAMBER...

DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS

Diffuser With Corner HCG