Larry A. Spiegel

Person

Atascadero, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for use in grind spindle alignment
- Patent number 9,610,669
- Issue date Apr 4, 2017
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods of processing substrates
- Patent number 9,393,669
- Issue date Jul 19, 2016
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
CMP retaining ring with soft retaining ring insert
- Patent number 9,193,030
- Issue date Nov 24, 2015
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
CMP retaining ring with soft retaining ring insert
- Patent number 8,740,673
- Issue date Jun 3, 2014
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Grant
Flexible membrane assembly for a CMP system and method of using
- Patent number 7,959,496
- Issue date Jun 14, 2011
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier with pressurized membrane and retaining ring actuator
- Patent number 7,238,083
- Issue date Jul 3, 2007
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier with pressurized membrane and retaining ring actuator
- Patent number 7,131,892
- Issue date Nov 7, 2006
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Grant
Independent edge control for CMP carriers
- Patent number 7,063,604
- Issue date Jun 20, 2006
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring for wafer carriers
- Patent number 7,063,605
- Issue date Jun 20, 2006
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer carrier with pressurized membrane and retaining ring actuator
- Patent number 7,033,252
- Issue date Apr 25, 2006
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Grant
Protection of work piece during surface processing
- Patent number 7,018,268
- Issue date Mar 28, 2006
- Strasbaugh
- Salman Moudrek Kassir
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Retaining ring for wafer carriers
- Patent number 6,869,348
- Issue date Mar 22, 2005
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
CMP RETAINING RING WITH SOFT RETAINING RING INSERT
- Publication number 20140287657
- Publication date Sep 25, 2014
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for cleaning grinding work chuck using a scraper
- Publication number 20140202491
- Publication date Jul 24, 2014
- Michael Vogtmann
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND SYSTEMS FOR USE IN GRIND SPINDLE ALIGNMENT
- Publication number 20140134927
- Publication date May 15, 2014
- Strasbaugh
- Thomas A. Walsh
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS OF PROCESSING SUBSTRATES
- Publication number 20130130593
- Publication date May 23, 2013
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Wafer Carrier with Flexible Pressure Plate
- Publication number 20130078812
- Publication date Mar 28, 2013
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
CMP Retaining Ring with Soft Retaining Ring Insert
- Publication number 20120088366
- Publication date Apr 12, 2012
- Strasbaugh
- William J. Kalenian
- B24 - GRINDING POLISHING
Information Patent Application
Replaceable cover for membrane carrier
- Publication number 20120040591
- Publication date Feb 16, 2012
- Strasbaugh, Inc.
- Larry Alan Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
Flexible Membrane Assembly for a CMP System
- Publication number 20090176445
- Publication date Jul 9, 2009
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
Wafer carrier with pressurized membrane and retaining ring actuator
- Publication number 20070054603
- Publication date Mar 8, 2007
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Application
Independent edge control for CMP carriers
- Publication number 20070010181
- Publication date Jan 11, 2007
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
WAFER CARRIER WITH PRESSURIZED MEMBRANE AND RETAINING RING ACTUATOR
- Publication number 20060194519
- Publication date Aug 31, 2006
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Application
Wafer carrier with pressurized membrane and retaining ring actuator
- Publication number 20050215182
- Publication date Sep 29, 2005
- Strasbaugh
- John Fuhriman
- B24 - GRINDING POLISHING
Information Patent Application
Independent edge control for CMP carriers
- Publication number 20050202765
- Publication date Sep 15, 2005
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
Retaining ring for wafer carriers
- Publication number 20050164617
- Publication date Jul 28, 2005
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
RETAINING RING FOR WAFER CARRIERS
- Publication number 20050075062
- Publication date Apr 7, 2005
- Strasbaugh
- Larry A. Spiegel
- B24 - GRINDING POLISHING
Information Patent Application
PROTECTION OF WORK PIECE DURING SURFACE PROCESSING
- Publication number 20030211813
- Publication date Nov 13, 2003
- Strasbaugh, Inc., A California Corporation
- Salman Moudrek Kassir
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Larry A. Spiegel

Person

Patents Grantslast 30 patents

Methods and systems for use in grind spindle alignment

Systems and methods of processing substrates

CMP retaining ring with soft retaining ring insert

CMP retaining ring with soft retaining ring insert

Flexible membrane assembly for a CMP system and method of using

Wafer carrier with pressurized membrane and retaining ring actuator

Wafer carrier with pressurized membrane and retaining ring actuator

Independent edge control for CMP carriers

Retaining ring for wafer carriers

Wafer carrier with pressurized membrane and retaining ring actuator

Protection of work piece during surface processing

Retaining ring for wafer carriers

Patents Applicationslast 30 patents

CMP RETAINING RING WITH SOFT RETAINING RING INSERT

Method and apparatus for cleaning grinding work chuck using a scraper

METHODS AND SYSTEMS FOR USE IN GRIND SPINDLE ALIGNMENT

SYSTEMS AND METHODS OF PROCESSING SUBSTRATES

Wafer Carrier with Flexible Pressure Plate

CMP Retaining Ring with Soft Retaining Ring Insert

Replaceable cover for membrane carrier

Flexible Membrane Assembly for a CMP System

Wafer carrier with pressurized membrane and retaining ring actuator

Independent edge control for CMP carriers

WAFER CARRIER WITH PRESSURIZED MEMBRANE AND RETAINING RING ACTUATOR

Wafer carrier with pressurized membrane and retaining ring actuator

Independent edge control for CMP carriers

Retaining ring for wafer carriers

RETAINING RING FOR WAFER CARRIERS

PROTECTION OF WORK PIECE DURING SURFACE PROCESSING