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Larry Martinez
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Gilory, CA, US
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last 30 patents
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Patent Grant
Parasitic plasma prevention in plasma processing chambers
Patent number
9,728,429
Issue date
Aug 8, 2017
Lam Research Corporation
Anthony Ricci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
PARASITIC PLASMA PREVENTION IN PLASMA PROCESSING CHAMBERS
Publication number
20120024449
Publication date
Feb 2, 2012
LAM RESEARCH CORPORATION
Anthony Ricci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...