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PATTERNING DEVICE
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Publication number 20200096875
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Publication date Mar 26, 2020
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ASML NETHERLANDS B.V.
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Marcus Adrianus VAN DE KERKHOF
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patterning Device
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Publication number 20190324365
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Publication date Oct 24, 2019
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ASML NETHERLANDS B.V.
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Pieter Cristiaan DE GROOT
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G02 - OPTICS
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Patterning Device
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Publication number 20190137861
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Publication date May 9, 2019
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ASML NETHERLANDS B.V.
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Pieter Cristiaan DE GROOT
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD FOR A LITHOGRAPHIC APPARATUS
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Publication number 20170010542
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Publication date Jan 12, 2017
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ASML NETHERLANDS B.V.
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Laurentius Cornelius De Winter
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic Apparatus
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Publication number 20160033860
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Publication date Feb 4, 2016
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ASML NETHERLANDS B.V.
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James Norman WILEY
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHIC METHOD AND APPARATUS
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Publication number 20130141706
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Publication date Jun 6, 2013
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ASML NETHERLANDS B.V.
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Peter David ENGBLOM
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD FOR A LITHOGRAPHIC APPARATUS
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Publication number 20120200838
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Publication date Aug 9, 2012
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ASML NETHERLANDS B.V.
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Laurentius Cornelius DE WINTER
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic Apparatus and Method
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Publication number 20110200922
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Publication date Aug 18, 2011
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ASML NETHERLANDS B.V.
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Carsten Andreas Köhler
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD FOR A LITHOGRAPHIC APPARATUS
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Publication number 20100149508
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Publication date Jun 17, 2010
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ASML NETHERLANDS B.V.
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Luis Alberto Colina Santamaria
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD FOR A LITHOGRAPHIC APPARATUS
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Publication number 20100129742
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Publication date May 27, 2010
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ASML NETHERLANDS B.V.
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Laurentius Cornelis DE WINTER
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD FOR A LITHOGRAPHIC APPARATUS
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Publication number 20100123887
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Publication date May 20, 2010
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ASML NETHERLANDS B.V.
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Laurentius Cornelius DE WINTER
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Lithographic apparatus and method
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Publication number 20080291412
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Publication date Nov 27, 2008
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ASML NETHERLANDS B.V.
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Robert KAZINCZI
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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DEVICE MANUFACTURING METHOD
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Publication number 20080030708
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Publication date Feb 7, 2008
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ASML NETHERLANDS B.V.
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Steven George Hansen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Device manufacturing method
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Publication number 20050007573
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Publication date Jan 13, 2005
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ASML NETHERLANDS B.V.
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Steven George Hansen
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY