Patent Application
20050007573
1. Field of the Invention
The present invention relates to device manufacturing methods using lithographic apparatus.
2. Description of the Prior Art
A lithographic apparatus is a machine that applies a desired pattern onto a target portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). In that circumstance, a patterning structure, such as a mask, may be used to generate a circuit pattern corresponding to an individual layer of the IC, and this pattern can be imaged onto a target portion (e.g., comprising part of, one or several dies) on a substrate (e.g., a silicon wafer) that has a layer of radiation-sensitive material (resist). In general, a single substrate will contain a network of adjacent target portions that are successively exposed. Known lithographic apparatus include so-called steppers, in which each target portion is irradiated by exposing an entire pattern onto the target portion in one go, and so-called scanners, in which each target portion is irradiated by scanning the pattern through the projection beam in a given direction (the “scanning”-direction) while synchronously scanning the substrate parallel or anti-parallel to this direction.
It is well known that manipulation of the illumination of the mask in a lithography apparatus affects the projected (aerial) image and hence it is common to select an illumination mode that is optimum for a given pattern to be printed. The illumination mode may be selected to optimize critical dimension, depth of focus, exposure latitude or a combination of these and other parameters.
In a lithographic apparatus using Kohler illumination, the illumination mode is most often determined, and described, by defining the intensity distribution in a pupil plane of the illumination system. Position in the pupil plane corresponds to angle of incidence at the mask so that a uniform intensity in the pupil plane, up to a certain radius commonly referred to a sigma (a, where 0<σ<1), gives rise to illumination form all angles, up to a certain maximum determined by the σ value. Known illumination modes include: conventional (uniform up to a certain σ value), annular (defined by σinner and σouter values), dipole, quadrupole and more complex arrangements. Illumination modes consisting of (uniform) light areas on a dark background are conventionally described by describing the shape and placement of the light areas. For example, WO 02/05029 describes multipole illumination modes where the poles are in the form of chevrons and also suggests that multipole modes with round poles may be improved by making the poles square or rectangular. U.S. Pat. No. 6,045,976 describes illumination modes involving bright lines extending across the pupil plane in parallel to and spaced from the X or Y axis. These modes are intended for exposure of line patterns which are parallel to the bright lines of the illumination mode.
Illumination modes may be formed in various ways. The σ value of a conventional illumination mode can be controlled using a zoom lens while σinner and σouter values of an annular mode can be controlled using a zoom-axicon. More complex modes may be formed using a diaphragm with appropriate apertures in the pupil plane or by a diffractive optical element. The illumination system may comprise a rod-shaped reflective integrator for homogenizing the intensity distribution of radiation at the patterning means. The rod-shaped integrator typically has a rectangular cross section and may be disposed along the optical axis of the illumination system at a position upstream of said pupil plane. Typically, said diffractive optical element is arranged to generate a pre-selected angular intensity distribution upstream of the integrator. This angular intensity distribution is transformed into a corresponding spatial intensity distribution in the pupil plane of the illumination system. Due to reflections in the rod integrator, the latter intensity distribution is symmetric with respect to the sides of said rectangular cross section.
To print very small, isolated gates—that is a pair of lines close together but isolated from other structures—it has been proposed to use an alternating phase shift mask (Alt-PSM) and a conventional illumination mode with a very low σ value, e.g., 0.15. However, such a method still leaves room for improvement of the process latitude and the use of a small a value means the light is very localized in the illumination and projection systems which causes localized lens heating problems.
Embodiments of the invention provide an improved method and apparatus for printing small isolated gates, for example, and in particular such a method and apparatus which provides improved process latitude and/or more uniform lens heating.
According to an aspect of the invention, there is provided a lithographic projection apparatus including: an illumination system for providing a projection beam of radiation, a support structure for supporting patterning structure, the patterning structure serving to impart the projection beam with a pattern in its cross-section, a substrate table for holding a substrate, and a projection system for projecting the patterned beam onto a target portion of the substrate, optical elements constructed and arranged to define an intensity distribution and impart an on-axis, substantially rectilinear intensity distribution on the projection beam, and by a polarizer for imparting a linear polarization to the projection beam.
Where the intensity distribution is a rectangle or bar, the longer dimension of the rectangle may be parallel to the lines of the gates to be printed, which are normally aligned with the X or Y axis of the apparatus. Where the intensity distribution is a square, the square may be oriented such that its sides are parallel to the X and Y axes or such that its diagonals are parallel to the X and Y axes. The latter orientation may also be described as a diamond-shaped illumination mode and may be unpolarized. A cross-shaped intensity distribution may have the arms of the cross aligned with the X and Y axes or on the diagonals. The cross-shaped intensity distribution may also be advantageous without polarization. A rhomboid intensity distribution, that is with opposite sides parallel and equal but not all sides and angles equal, is also advantageous.
For a given area in the pupil plane, a rectilinear intensity distribution can provide the same depth of focus as a conventional, circular mode whilst distributing the radiation more evenly in the illumination and projection systems, reducing lens heating effects.
An on-axis illumination mode is, for the purposes of this invention, one in which the optical axis of the illumination system passes through the bright area of the pupil plane. The center of gravity of the bright area preferably lies on the optical axis but that is not essential.
The present invention is particularly advantageous when carrying out lithography using phase-shift masks (PSM).
The direction of polarization of the projection beam should be parallel to the lines to be printed and where the intensity distribution is rectangular, also parallel to the long sides of the rectangle. The use of polarized radiation in this way can provide an increase in exposure latitude of up to 70%.
In another aspect of the invention, the rectilinear intensity distribution has at least two elongate poles located off-axis, rather than a single pole located on-axis, and the direction of polarization is substantially parallel to the long direction of the poles. In a preferred embodiment of this aspect, there are four elongate poles—two oriented along a first direction and two oriented along a second direction substantially orthogonal to the first direction—the direction of polarization of the radiation in each pole being substantially parallel to the long direction of that pole.
Another aspect of the invention provides a lithographic projection apparatus including: an illumination system for providing a projection beam of radiation, a support structure for supporting patterning means, the patterning means serving to impart the projection beam with a pattern in its cross-section, a substrate table for holding a substrate, and a projection system for projecting the patterned beam onto a target portion of the substrate, optical elements constructed and arranged to define an intensity distribution and impart an intensity distribution that is not symmetric in an interchange of two orthogonal axes, and by a polarizer to impart a linear polarization the projection beam.
The intensity distribution not being symmetric about an interchange of orthogonal axes means that it is not the same in the X direction as in the Y. This means that the shape of the intensity distribution can be separately optimized for features aligned in the X and Y directions.
According to a further aspect of the invention there is provided a device manufacturing method including: providing a substrate, providing a projection beam of radiation using an illumination system, using patterning means to impart the projection beam with a pattern in its cross-section, projecting the patterned beam of radiation onto a target portion of the substrate, wherein said desired intensity distribution comprises an on-axis rectilinear intensity distribution on the projection beam, and linearly polarizing said projection beam.
Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of ICs, it should be understood that the lithographic apparatus described herein may have other applications, such as the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, liquid-crystal displays (LCDs), thin-film magnetic heads, etc. The skilled artisan will appreciate that, in the context of such alternative applications, any use of the terms “wafer” or “die” herein may be considered as synonymous with the more general terms “substrate” or “target portion,” respectively. The substrate referred to herein may be processed, before or after exposure, in for example a track (a tool that typically applies a layer of resist to a substrate and develops the exposed resist) or a metrology or inspection tool. Where applicable, the disclosure herein may be applied to such and other substrate processing tools. Further, the substrate may be processed more than once, for example in order to create a multi-layer IC, so that the term substrate used herein may also refer to a substrate that already contains multiple processed layers.
The terms “radiation” and “beam” used herein encompass all types of electromagnetic radiation, including ultraviolet (UV) radiation (e.g., having a wavelength of 365, 248, 193, 157 or 126 nm) and extreme ultra-violet (EUV) radiation (e.g., having a wavelength in the range of 5-20 nm).
The term “patterning structure” used herein should be broadly interpreted as referring to structures that can be used to impart a projection beam with a pattern in its cross-section such as to create a pattern in a target portion of the substrate. It should be noted that the pattern imparted to the projection beam may not exactly correspond to the desired pattern in the target portion of the substrate. Generally, the pattern imparted to the projection beam will correspond to a particular functional layer in a device being created in the target portion, such as an integrated circuit.
Patterning structures may be transmissive or reflective. Examples of patterning structures include masks, programmable mirror arrays, and programmable LCD panels. Masks are well known in lithography, and include mask types such as binary, alternating phase-shift, and attenuated phase-shift, as well as various hybrid mask types. An example of a programmable mirror array employs a matrix arrangement of small mirrors, each of which can be individually tilted so as to reflect an incoming radiation beam in different directions; in this manner, the reflected beam is patterned. In each example of patterning means, the support structure may be a frame or table, for example, which may be fixed or movable as required and which may ensure that the patterning means is at a desired position, for example with respect to the projection system. Any use of the terms “reticle” or “mask” herein may be considered synonymous with the more general term “patterning structure.”
The term “projection system” used herein should be broadly interpreted as encompassing various types of projection system, including refractive optical systems, reflective optical systems, and catadioptric optical systems, as appropriate for example for the exposure radiation being used, or for other factors such as the use of an immersion fluid or the use of a vacuum. Any use of the term “lens” herein may be considered as synonymous with the more general term “projection system.”
The illumination system may also encompass various types of optical components, including refractive, reflective, and catadioptric optical components for directing, shaping, or controlling the projection beam of radiation, and such components may also be referred to below, collectively or singularly, as a “lens.”
The lithographic apparatus may be of a type having two (dual stage) or more substrate tables (and/or two or more mask tables). In such “multiple stage” machines the additional tables may be used in parallel, or preparatory steps may be carried out on one or more tables while one or more other tables are being used for exposure.
The lithographic apparatus may also be of a type wherein the substrate is immersed in a liquid having a relatively high refractive index, e.g., water, so as to fill a space between the final element of the projection system and the substrate. Immersion liquids may also be applied to other spaces in the lithographic apparatus, for example, between the mask and the first element of the projection system. Immersion techniques are well known in the art for increasing the numerical aperture of projection systems.
Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which corresponding reference symbols indicate corresponding parts, and in which:
FIGS. 7 to 11 illustrate illumination modes according to second through sixth embodiments according to the present invention; and
Embodiments
As here depicted, the apparatus is of a transmissive type (e.g., employing a transmissive mask). Alternatively, the apparatus may be of a reflective type (e.g., employing a programmable mirror array of a type as referred to above).
The illuminator IL receives a beam of radiation from a radiation source SO. The source and the lithographic apparatus may be separate entities, for example when the source is an excimer laser. In such cases, the source is not considered to form part of the lithographic apparatus and the radiation beam is passed from the source SO to the illuminator IL with the aid of a beam delivery system BD comprising for example suitable directing mirrors and/or a beam expander. In other cases the source may be integral part of the apparatus, for example when the source is a mercury lamp. The source SO and the illuminator IL, together with the beam delivery system BD if required, may be referred to as a radiation system.
The illuminator IL may comprise adjusting means AM for adjusting the angular intensity distribution of the beam. Generally, at least the outer and/or inner radial extent (commonly referred to as σ-outer and σ-inner, respectively) of the intensity distribution in a pupil plane of the illuminator can be adjusted. In addition, the illuminator IL generally comprises various other components, such as an integrator IN and a condenser CO. The illuminator provides a conditioned beam of radiation, referred to as the projection beam PB, having a desired uniformity and intensity distribution in its cross-section.
The projection beam PB is incident on the mask MA, which is held on the mask table MT. Having traversed the mask MA, the projection beam PB passes through the lens PL, which focuses the beam onto a target portion C of the substrate W. With the aid of the second positioning means PW and position sensor IF (e.g., an interferometric device), the substrate table WT can be moved accurately, e.g., so as to position different target portions C in the path of the beam PB. Similarly, the first positioning means PM and another position sensor (which is not explicitly depicted in
The depicted apparatus can be used in the following preferred modes:
1. In step mode, the mask table MT and the substrate table WT are kept essentially stationary, while an entire pattern imparted to the projection beam is projected onto a target portion C in one go (i.e., a single static exposure). The substrate table WT is then shifted in the X and/or Y direction so that a different target portion C can be exposed. In step mode, the maximum size of the exposure field limits the size of the target portion C imaged in a single static exposure.
2. In scan mode, the mask table MT and the substrate table WT are scanned synchronously while a pattern imparted to the projection beam is projected onto a target portion C (i.e., a single dynamic exposure). The velocity and direction of the substrate table WT relative to the mask table MT is determined by the (de-)magnification and image reversal characteristics of the projection system PL. In scan mode, the maximum size of the exposure field limits the width (in the non-scanning direction) of the target portion in a single dynamic exposure, whereas the length of the scanning motion determines the height (in the scanning direction) of the target portion.
3. In another mode, the mask table MT is kept essentially stationary holding a programmable patterning means, and the substrate table WT is moved or scanned while a pattern imparted to the projection beam is projected onto a target portion C. In this mode, generally a pulsed radiation source is employed and the programmable patterning means is updated as required after each movement of the substrate table WT or in between successive radiation pulses during a scan. This mode of operation can be readily applied to maskless lithography that utilizes programmable patterning means, such as a programmable mirror array of a type as referred to above.
Combinations and/or variations on the above described modes of use or entirely different modes of use may also be employed.
The above described lithographic apparatus an be used with various different types of mask. The most basic type of mask is a transparent plate, e.g., of quartz glass, on which an opaque layer, e.g., of chrome, is provided to define the pattern. More advanced types of mask modulate the thickness of the mask to vary the phase of the projection beam to various effects.
In Chromeless Phase Edge lithography, the mask MA is illuminated normally and has a pattern of thickness variations forming a phase grating. The + and −first orders are captured by the projection system PL and interfere to form the aerial image A1, which has a periodicity higher than that of the mask.
Lithography using an Alternating Phase Shift Mask appears similar to Chromeless Phase Edge lithography but instead the pattern is defined in chrome on the mask. Underlying thickness variations in the mask are provided so that the phase of radiation transmitted through adjacent features alternates to prevent constructive interference between adjacent features resulting in the printing of ghost lines.
Chromeless Phase Lithography utilizes inclined illumination and interference between the 0th and one 1st order to form an image.
In the present invention, to print very narrow gates, e.g., of 32 nm width, a rectangular monopole illumination mode is used, as shown in
0.404*R=B/4 (1)
This condition can be derived by considering the average a values xb, xc for the two illumination modes, as shown in
The height H of the bar has little impact on the exposure parameters.
The rectangular monopole is advantageous as compared to the equivalent circular monopole because the projection beam will be less localized in the projection system leading to less localized lens heating and hence a reduction in distortion caused by lens heating.
This graph show that the same exposure latitude and depth of focus can be achieved with a bar as with a monopole of low-σ, provided the rule that B=1.6*R is followed. Furthermore, the value of H has little influence on process latitude.
One way of effecting such an illumination mode is to use a conventional illumination mode with σ=0.5 and use masking blades in a pupil plane of the radiation system to reduce the illumination down to a rectangle of the desired shape and a polarizer in the blade aperture. Such an arrangement would provide an efficiency ε defined by:
Where B is the width of the bar and R the radius of the conventional illumination setting which is bladed down. Both are in units of σ.
For the specific example of B=0.16 and R=0.50, ε=20%, which compares favorably with an efficiency of 16% as would be obtained for a monopole of σ=0.10 obtained by blading down a setting of σ=0.25. The local heating effect is equivalent to a monopole of σ=0.23.
The appropriate illumination mode and dimensions for a given exposure can be determined for a given pitch, p, wavelength, λ, of the exposure radiation and numeric aperture, NA, of the projection system. Dimensions of optimum illumination modes of different shape, where 100% of the 0th and 1st orders are captured by the projection system and the area of the 0th order within the illuminator pupil is maximum are given by:
As a guideline, an upper limit to the width of a bar can be set as:
These expressions can be derived using simple mathematical analysis.
It should be noted that where the radiation source emits a polarized beam, e.g., an excimer laser, rather than providing a polarizer, a normally-present de-polarizer may be removed and, if necessary, replaced by a suitable retarder (wave plate) to rotate the polarization to the desired orientation.
Embodiment 2
A second embodiment is the same as the first embodiment except that it uses a cross-shaped on-axis monopole illumination mode, as shown in
The cross-shaped illumination mode is preferably symmetric about two axes and thence can be characterized by two parameters—the arm width A and the length L. Appropriate values for A and L can be determined in the same way as B and H are determined in the first embodiment. Preferably, the horizontal arm (bar) dimensions are determined for the horizontal features in the pattern and the vertical arm dimensions for the vertical features in the patterns. This may lead to arms of different lengths and/or widths.
Embodiment 3
A third embodiment is the same as the first embodiment except that it uses a diamond-shaped (rhomboid) on-axis monopole illumination mode, as shown in
Embodiment 4
A fourth embodiment is the same as the first embodiment except that it uses an off-axis rectangular intensity distribution, as shown in
The intensity distribution comprises four off-axis rectangular poles (bars) in each of which the radiation is polarized parallel to the length of the bar. The bars are arranged to form a square centered on the optical axis and may be characterized by their length, H, and width, B. The illumination mode, which may be referred to as a “quadrubar,” provides an unexpectedly high process latitude for both isolated and periodic features without assist features, especially when using a chromeless phase lithography mask. Advantages are also obtained with binary and attenuated phase shift masks.
An equivalent setting to the quadrubar can be achieved in an existing apparatus using a diffractive optical element to define a quadrupole illumination setting and setting the zoom-axicon to generate a narrow annular illumination setting. The resultant poles are like narrow arcs and are in many cases acceptable approximations to the linear bars of this embodiment.
Embodiment 5
A fifth embodiment is the same as the fourth embodiment except that it uses a dipole illumination mode, as shown in
Equivalent Illumination Modes
As discussed above, two illumination modes may be considered equivalent for imaging purposes if they have equal average a values, average a being defined as the first moment of intensity along the direction perpendicular to the feature orientation. Average a may also be referred to as center σ or σC. It is there fore possible to derive mathematically the dimensions of other illumination modes that would be equivalent to a given circular monopole of radius a. This leads to the following results:
Area is relative to total pupil filling.
Embodiment 6
A sixth embodiment is the same as the first embodiment except that it uses a quadrupole illumination mode, as shown in
The quadrupole mode is effectively four parts of an annular mode and so can be characterized by inner and outer sigma values, σ1 and σo, as well as a sector angle φ. Values of σ1=0.40, σo=0.80 and φ=20° give a mode equivalent to a circular monopole of σ=0.30. Polarization of the light in the four poles is indicated by the arrows outside the circle.
Embodiment 7
In any of the embodiments described above the illumination system may comprise a rod shaped reflective integrator for homogenizing the intensity distribution of radiation at the patterning means, as explained above. The illumination system may further comprise a diffractive optical element (“DOE”) arranged to generate a pre-selected circular or rectangular shaped multipole angular intensity distribution upstream of the integrator. In any of the fourth, fifth and sixth embodiments, the length of substantially bar-shaped poles can conveniently be adjusted by applying a rotation to said diffractive optical element around an axis parallel to the optical axis of the illumination system. The angular intensity distribution generated by the diffractive optical element is transformed into a corresponding spatial intensity distribution in the pupil plane of the illumination system. Due to reflections in the rod integrator, the latter intensity distribution is symmetric with respect to the sides of said rectangular cross section. Hereafter, these sides are assumed to define x and y directions of an orthogonal system of x,y-axes.
a shows the pupil intensity distribution downstream of the integrator when a DOE for duo-bar dipole illumination in a nominal rotational orientation is used (as an optical element for defining a corresponding angular intensity distribution upstream of the integrator). The duo-bar poles 120 with length H1 are centered at the x-axis. In
While specific embodiments of the invention have been described above, it will be appreciated that the invention may be practiced otherwise than as described. The description is not intended to limit the invention.
| Number | Date | Country | Kind |
|---|---|---|---|
| 03252182.5 | Apr 2003 | EP | regional |
