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Lawrence C. Lane
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San Jose, CA, US
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last 30 patents
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Patent Grant
Apparatus for preventing deposition on frontside peripheral region...
Patent number
5,882,417
Issue date
Mar 16, 1999
Novellus Systems, Inc.
Everhardus P. van de Ven
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
Patent number
5,843,233
Issue date
Dec 1, 1998
Novellus Systems, Inc.
Everhardus P. van de Ven
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
Patent number
5,769,951
Issue date
Jun 23, 1998
Everhardus P. van de Ven
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...