Lei SUN

Person

Albany, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Gate contact structures and cross-coupled contact structures for tr...
- Patent number 12,002,869
- Issue date Jun 4, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate contact structures and cross-coupled contact structures for tr...
- Patent number 11,469,309
- Issue date Oct 11, 2022
- GLOBALFOUNDRIES U.S. INC.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid optical and EUV lithography
- Patent number 11,061,315
- Issue date Jul 13, 2021
- GLOBALFOUNDRIES U.S. Inc.
- Jia Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interconnects separated by a dielectric region formed using removab...
- Patent number 10,896,874
- Issue date Jan 19, 2021
- GLOBALFOUNDRIES Inc.
- Guoxiang Ning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet (EUV) lithography mask
- Patent number 10,802,393
- Issue date Oct 13, 2020
- GLOBALFOUNDRIES Inc.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photolithography methods and structures that reduce stochastic defects
- Patent number 10,782,606
- Issue date Sep 22, 2020
- GLOBALFOUNDRIES Inc.
- Yong Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling back-end-of-line dimensions of semiconductor devices
- Patent number 10,727,120
- Issue date Jul 28, 2020
- GLOBALFOUNDRIES Inc.
- Sean X Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned cuts in an interconnect structure
- Patent number 10,685,874
- Issue date Jun 16, 2020
- GLOBALFOUNDRIES Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming gate contact structures and cross-coupled contac...
- Patent number 10,651,284
- Issue date May 12, 2020
- GLOBALFOUNDRIES Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned quadruple patterning pitch walking solution
- Patent number 10,642,160
- Issue date May 5, 2020
- GLOBALFOUNDRIES Inc.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of protecting structure of integrated circuit from rework
- Patent number 10,636,656
- Issue date Apr 28, 2020
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay mark structures
- Patent number 10,627,720
- Issue date Apr 21, 2020
- GLOBALFOUNDRIES Inc.
- Lei Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of identifying space within integrated circuit structure as...
- Patent number 10,622,266
- Issue date Apr 14, 2020
- GLOBALFOUNDRIES Inc.
- Erik A. Verduijn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate contact structures and cross-coupled contact structures for tr...
- Patent number 10,490,455
- Issue date Nov 26, 2019
- GLOBALFOUNDRIES Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet mirrors and masks with improved reflectivity
- Patent number 10,468,149
- Issue date Nov 5, 2019
- GLOBALFOUNDRIES Inc.
- Yulu Chen
- G02 - OPTICS
Information Patent Grant
Intergrated circuit structure including single diffusion break abut...
- Patent number 10,388,652
- Issue date Aug 20, 2019
- GLOBALFOUNDRIES Inc.
- Yongiun Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy assist features for pattern support
- Patent number 10,332,745
- Issue date Jun 25, 2019
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dummy gate used as interconnection and method of making the same
- Patent number 10,283,505
- Issue date May 7, 2019
- GLOBALFOUNDRIES Inc.
- Wenhui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming gate contact structures and cross-coupled contac...
- Patent number 10,236,215
- Issue date Mar 19, 2019
- GLOBALFOUNDRIES Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal-insulator-metal capacitors with dielectric inner spacers
- Patent number 10,211,147
- Issue date Feb 19, 2019
- GLOBALFOUNDRIES Inc.
- Xunyuan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned metal wire on contact structure and method for forming...
- Patent number 10,199,271
- Issue date Feb 5, 2019
- GLOBALFOUNDRIES Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shrink process aware assist features
- Patent number 10,153,162
- Issue date Dec 11, 2018
- GLOBALFOUNDRIES Inc.
- Ryan Ryoung-Han Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned lithographic patterning
- Patent number 10,056,292
- Issue date Aug 21, 2018
- GLOBALFOUNDRIES Inc.
- Shao Beng Law
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post spacer self-aligned cuts
- Patent number 10,056,291
- Issue date Aug 21, 2018
- GLOBALFOUNDRIES Inc.
- Shao Beng Law
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming integrated circuit structure using extreme ultra...
- Patent number 10,014,297
- Issue date Jul 3, 2018
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making self-aligned continuity cuts in mandrel and non-ma...
- Patent number 9,953,834
- Issue date Apr 24, 2018
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sidewall spacer pattern formation method
- Patent number 9,911,604
- Issue date Mar 6, 2018
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making self-aligned continuity cuts in mandrel and non-ma...
- Patent number 9,859,120
- Issue date Jan 2, 2018
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for optical proximity correction in the design and fabricat...
- Patent number 9,651,855
- Issue date May 16, 2017
- GLOBALFOUNDRIES, INC.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dummy gate used as interconnection and method of making the same
- Patent number 9,595,478
- Issue date Mar 14, 2017
- GLOBALFOUNDRIES Inc.
- Wenhui Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...
- Publication number 20220416054
- Publication date Dec 29, 2022
- GLOBALFOUNDRIES U.S. Inc.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERCONNECTS SEPARATED BY A DIELECTRIC REGION FORMED USING REMOVAB...
- Publication number 20200312764
- Publication date Oct 1, 2020
- GLOBALFOUNDRIES INC.
- Guoxiang Ning
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...
- Publication number 20200203497
- Publication date Jun 25, 2020
- GLOBALFOUNDRIES INC.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED CUTS IN AN INTERCONNECT STRUCTURE
- Publication number 20200194306
- Publication date Jun 18, 2020
- GLOBALFOUNDRIES INC.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID OPTICAL AND EUV LITHOGRAPHY
- Publication number 20200159105
- Publication date May 21, 2020
- GLOBALFOUNDRIES INC.
- Jia Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING BACK-END-OF-LINE DIMENSIONS OF SEMICONDUCTOR DEVICES
- Publication number 20200066586
- Publication date Feb 27, 2020
- GLOBALFOUNDRIES INC.
- SEAN X LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY METHODS AND STRUCTURES THAT REDUCE STOCHASTIC DEFECTS
- Publication number 20200004155
- Publication date Jan 2, 2020
- GLOBALFOUNDRIES INC.
- Yong Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF PROTECTING STRUCTURE OF INTEGRATED CIRCUIT FROM REWORK
- Publication number 20190318927
- Publication date Oct 17, 2019
- GLOBALFOUNDRIES INC.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY SYSTEM AND METHOD USING A RETICLE WITH MULTIPLE DI...
- Publication number 20190278166
- Publication date Sep 12, 2019
- GLOBALFOUNDRIES INC.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELF-ALIGNED QUADRUPLE PATTERNING PITCH WALKING SOLUTION
- Publication number 20190271918
- Publication date Sep 5, 2019
- GLOBALFOUNDRIES INC.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT STRUCTURE INCLUDING SINGLE DIFFUSION BREAK ABUTT...
- Publication number 20190148373
- Publication date May 16, 2019
- GLOBALFOUNDRIES INC.
- Yongiun Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...
- Publication number 20190148240
- Publication date May 16, 2019
- GLOBALFOUNDRIES INC.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTAC...
- Publication number 20190123162
- Publication date Apr 25, 2019
- GLOBALFOUNDRIES INC.
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY MASK
- Publication number 20190113836
- Publication date Apr 18, 2019
- GLOBALFOUNDRIES INC.
- Lei SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OVERLAY MARK STRUCTURES
- Publication number 20190056671
- Publication date Feb 21, 2019
- GLOBALFOUNDRIES INC.
- Lei Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL-INSULATOR-METAL CAPACITORS WITH DIELECTRIC INNER SPACERS
- Publication number 20190013269
- Publication date Jan 10, 2019
- GLOBALFOUNDRIES INC.
- Xunyuan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY ASSIST FEATURES FOR PATTERN SUPPORT
- Publication number 20180337045
- Publication date Nov 22, 2018
- GLOBALFOUNDRIES INC.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF IDENTIFYING SPACE WITHIN INTEGRATED CIRCUIT STRUCTURE AS...
- Publication number 20180286681
- Publication date Oct 4, 2018
- GLOBALFOUNDRIES INC.
- Erik A. Verduijn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET MIRRORS AND MASKS WITH IMPROVED REFLECTIVITY
- Publication number 20180226166
- Publication date Aug 9, 2018
- GLOBALFOUNDRIES INC.
- Yulu Chen
- G02 - OPTICS
Information Patent Application
POST SPACER SELF-ALIGNED CUTS
- Publication number 20180144976
- Publication date May 24, 2018
- GLOBALFOUNDRIES INC.
- Shao Beng LAW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED LITHOGRAPHIC PATTERNING
- Publication number 20180144979
- Publication date May 24, 2018
- GLOBALFOUNDRIES INC.
- Shao Beng LAW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHRINK PROCESS AWARE ASSIST FEATURES
- Publication number 20180096839
- Publication date Apr 5, 2018
- GLOBALFOUNDRIES INC.
- Ryan Ryoung-Han KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY GATE USED AS INTERCONNECTION AND METHOD OF MAKING THE SAME
- Publication number 20170141110
- Publication date May 18, 2017
- GLOBALFOUNDRIES INC.
- Wenhui WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY GATE USED AS INTERCONNECTION AND METHOD OF MAKING THE SAME
- Publication number 20160365288
- Publication date Dec 15, 2016
- GLOBALFOUNDRIES INC.
- Wenhui WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR A LOW PROFILE ETCHABLE EUV ABSORBER LAYER WITH EMBEDDED...
- Publication number 20160223896
- Publication date Aug 4, 2016
- GLOBALFOUNDRIES INC.
- Lei SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...
- Publication number 20160162624
- Publication date Jun 9, 2016
- GLOBALFOUNDRIES, Inc.
- Lei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EUV PELLICLE FRAME WITH HOLES AND METHOD OF FORMING
- Publication number 20150168824
- Publication date Jun 18, 2015
- GLOBALFOUNDRIES INC.
- Lei SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BLAZED GRATING SPECTRAL PURITY FILTER AND METHODS OF MAKING SUCH A...
- Publication number 20150036978
- Publication date Feb 5, 2015
- GLOBALFOUNDRIES INC.
- Lei SUN
- G02 - OPTICS
Information Patent Application
METHODS AND SYSTEMS FOR DETERMINING A DOSE-TO-CLEAR OF A PHOTORESIST
- Publication number 20150023583
- Publication date Jan 22, 2015
- GLOBALFOUNDRIES, Inc.
- Lei Sun
- G01 - MEASURING TESTING
Information Patent Application
FABRY-PEROT THIN ABSORBER FOR EUV RETICLE AND A METHOD OF MAKING
- Publication number 20140254001
- Publication date Sep 11, 2014
- Lei SUN
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Gate contact structures and cross-coupled contact structures for tr...

Gate contact structures and cross-coupled contact structures for tr...

Hybrid optical and EUV lithography

Interconnects separated by a dielectric region formed using removab...

Extreme ultraviolet (EUV) lithography mask

Photolithography methods and structures that reduce stochastic defects

Controlling back-end-of-line dimensions of semiconductor devices

Self-aligned cuts in an interconnect structure

Methods of forming gate contact structures and cross-coupled contac...

Self-aligned quadruple patterning pitch walking solution

Methods of protecting structure of integrated circuit from rework

Overlay mark structures

Methods of identifying space within integrated circuit structure as...

Gate contact structures and cross-coupled contact structures for tr...

Extreme ultraviolet mirrors and masks with improved reflectivity

Intergrated circuit structure including single diffusion break abut...

Dummy assist features for pattern support

Dummy gate used as interconnection and method of making the same

Methods of forming gate contact structures and cross-coupled contac...

Metal-insulator-metal capacitors with dielectric inner spacers

Self-aligned metal wire on contact structure and method for forming...

Shrink process aware assist features

Self-aligned lithographic patterning

Post spacer self-aligned cuts

Methods of forming integrated circuit structure using extreme ultra...

Method of making self-aligned continuity cuts in mandrel and non-ma...

Sidewall spacer pattern formation method

Method of making self-aligned continuity cuts in mandrel and non-ma...

Methods for optical proximity correction in the design and fabricat...

Dummy gate used as interconnection and method of making the same

Patents Applicationslast 30 patents

GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...

INTERCONNECTS SEPARATED BY A DIELECTRIC REGION FORMED USING REMOVAB...

GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...

SELF-ALIGNED CUTS IN AN INTERCONNECT STRUCTURE

HYBRID OPTICAL AND EUV LITHOGRAPHY

CONTROLLING BACK-END-OF-LINE DIMENSIONS OF SEMICONDUCTOR DEVICES

PHOTOLITHOGRAPHY METHODS AND STRUCTURES THAT REDUCE STOCHASTIC DEFECTS

METHODS OF PROTECTING STRUCTURE OF INTEGRATED CIRCUIT FROM REWORK

PHOTOLITHOGRAPHY SYSTEM AND METHOD USING A RETICLE WITH MULTIPLE DI...

SELF-ALIGNED QUADRUPLE PATTERNING PITCH WALKING SOLUTION

INTEGRATED CIRCUIT STRUCTURE INCLUDING SINGLE DIFFUSION BREAK ABUTT...

GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTACT STRUCTURES FOR TR...

METHODS OF FORMING GATE CONTACT STRUCTURES AND CROSS-COUPLED CONTAC...

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY MASK

OVERLAY MARK STRUCTURES

METAL-INSULATOR-METAL CAPACITORS WITH DIELECTRIC INNER SPACERS

DUMMY ASSIST FEATURES FOR PATTERN SUPPORT

METHODS OF IDENTIFYING SPACE WITHIN INTEGRATED CIRCUIT STRUCTURE AS...

EXTREME ULTRAVIOLET MIRRORS AND MASKS WITH IMPROVED REFLECTIVITY

POST SPACER SELF-ALIGNED CUTS

SELF-ALIGNED LITHOGRAPHIC PATTERNING

SHRINK PROCESS AWARE ASSIST FEATURES

DUMMY GATE USED AS INTERCONNECTION AND METHOD OF MAKING THE SAME

DUMMY GATE USED AS INTERCONNECTION AND METHOD OF MAKING THE SAME

METHOD FOR A LOW PROFILE ETCHABLE EUV ABSORBER LAYER WITH EMBEDDED...

METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...

EUV PELLICLE FRAME WITH HOLES AND METHOD OF FORMING

BLAZED GRATING SPECTRAL PURITY FILTER AND METHODS OF MAKING SUCH A...

METHODS AND SYSTEMS FOR DETERMINING A DOSE-TO-CLEAR OF A PHOTORESIST

FABRY-PEROT THIN ABSORBER FOR EUV RETICLE AND A METHOD OF MAKING