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Lei Zhu
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Nitrogen-free dielectric anti-reflective coating and hardmask
Patent number
6,927,178
Issue date
Aug 9, 2005
Applied Materials, Inc.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DIRECT PLATING OF COPPER ON A RUTHENIUM ALLOY
Publication number
20110259750
Publication date
Oct 27, 2011
Hooman Hafezi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of direct plating of copper on a substrate structure
Publication number
20070125657
Publication date
Jun 7, 2007
Zhi-Wen Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for reducing tensile stress in a deposited layer
Publication number
20070049020
Publication date
Mar 1, 2007
APPLIED MATERIALS, INC.
Yi-Chiau Huang
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method of direct plating of copper on a ruthenium alloy
Publication number
20060283716
Publication date
Dec 21, 2006
Hooman Hafezi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Nitrogen-free dielectric anti-reflective coating and hardmask
Publication number
20040214446
Publication date
Oct 28, 2004
APPLIED MATERIALS, INC.
Bok Hoen Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...