Lena Nicolaides

Person

Castro Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
3D structure inspection or metrology using deep learning
- Patent number 11,644,756
- Issue date May 9, 2023
- KLA Corp.
- Scott A. Young
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Training a neural network for defect detection in low resolution im...
- Patent number 10,599,951
- Issue date Mar 24, 2020
- KLA-Tencor Corp.
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
All surface film metrology system
- Patent number 10,563,973
- Issue date Feb 18, 2020
- KLA-Tencor Corporation
- Shifang Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
- Patent number 10,533,954
- Issue date Jan 14, 2020
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for combined brightfield, darkfield, and phot...
- Patent number 9,772,297
- Issue date Sep 26, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for enhancing inspection sensitivity of an insp...
- Patent number 9,747,520
- Issue date Aug 29, 2017
- KLA-Tencor Corporation
- Shifang Li
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Apparatus and methods for measuring properties in a TSV structure u...
- Patent number 9,709,386
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
- Patent number 9,645,097
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Lena Nicolaides
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated inline inspection of wafer edge strain profiles using rap...
- Patent number 9,640,449
- Issue date May 2, 2017
- KLA-Tencor Corporation
- Timothy Goodwin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dopant metrology with information feedforward and feedback
- Patent number 8,962,351
- Issue date Feb 24, 2015
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system using UV probe
- Patent number 8,817,260
- Issue date Aug 26, 2014
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Dopant metrology with information feedforward and feedback
- Patent number 8,535,957
- Issue date Sep 17, 2013
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
LED solar illuminator
- Patent number 8,436,554
- Issue date May 7, 2013
- KLA-Tencor Corporation
- Guoheng Zhao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Measuring sheet resistance and other properties of a semiconductor
- Patent number 8,415,961
- Issue date Apr 9, 2013
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Measuring characteristics of ultra-shallow junctions
- Patent number 8,120,776
- Issue date Feb 21, 2012
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Methods for depth profiling in semiconductors using modulated optic...
- Patent number 7,982,867
- Issue date Jul 19, 2011
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Combined modulated optical reflectance and photoreflectance system
- Patent number 7,755,752
- Issue date Jul 13, 2010
- KLA-Tencor Corporation
- Alexei Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Methods for depth profiling in semiconductors using modulated optic...
- Patent number 7,705,977
- Issue date Apr 27, 2010
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Ion implant metrology system with fault detection and identification
- Patent number 7,660,686
- Issue date Feb 9, 2010
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system using UV probe
- Patent number 7,646,486
- Issue date Jan 12, 2010
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,619,741
- Issue date Nov 17, 2009
- KLA-Tencor Corp.
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Probe beam profile modulated optical reflectance system and methods
- Patent number 7,502,104
- Issue date Mar 10, 2009
- KLA-Tencor Corporation
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Combined modulated optical reflectance and electrical system for ul...
- Patent number 7,499,168
- Issue date Mar 3, 2009
- KLA-Tencor Corp.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system with multiple wavelengths
- Patent number 7,423,757
- Issue date Sep 9, 2008
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring peak carrier concentration in ultra-shallow ju...
- Patent number 7,403,022
- Issue date Jul 22, 2008
- KLA-Tencor, Inc.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Modulated reflectance measurement system using UV probe
- Patent number 7,362,441
- Issue date Apr 22, 2008
- KLA-Tencor Corporation
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring ion-implanted semiconductors with improved rep...
- Patent number 7,330,260
- Issue date Feb 12, 2008
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Grant
Photothermal system with spectroscopic pump and probe
- Patent number 7,280,215
- Issue date Oct 9, 2007
- Therma-Wave, Inc.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Characterization of ultra shallow junctions in semiconductor wafers
- Patent number 7,248,367
- Issue date Jul 24, 2007
- Therma-Wave, Inc.
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Grant
Position modulated optical reflectance measurement system for semic...
- Patent number 7,212,288
- Issue date May 1, 2007
- Therma-Wave, Inc.
- Jon Opsal
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
3D STRUCTURE INSPECTION OR METROLOGY USING DEEP LEARNING
- Publication number 20220043357
- Publication date Feb 10, 2022
- KLA Corporation
- Scott A. Young
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TRAINING A NEURAL NETWORK FOR DEFECT DETECTION IN LOW RESOLUTION IM...
- Publication number 20190303717
- Publication date Oct 3, 2019
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20180003648
- Publication date Jan 4, 2018
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
ALL SURFACE FILM METROLOGY SYSTEM
- Publication number 20170278236
- Publication date Sep 28, 2017
- KLA-Tencor Corporation
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Enhancing Inspection Sensitivity of an Insp...
- Publication number 20160275671
- Publication date Sep 22, 2016
- KLA-Tencor Corporation
- Shifang Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING
- Publication number 20150370175
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...
- Publication number 20150371910
- Publication date Dec 24, 2015
- KLA-Tencor Corporation
- Timothy Goodwin
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...
- Publication number 20150226676
- Publication date Aug 13, 2015
- KLA-Tencor Corporation
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
LED Solar Illuminator
- Publication number 20120256559
- Publication date Oct 11, 2012
- KLA-Tencor Corporation
- Guoheng Zhao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS FOR DEPTH PROFILING IN SEMICONDUCTORS USING MODULATED OPTIC...
- Publication number 20100315625
- Publication date Dec 16, 2010
- KLA-Tencor Corporation
- Alex SALNIK
- G01 - MEASURING TESTING
Information Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE
- Publication number 20100134785
- Publication date Jun 3, 2010
- KLA-Tencor Corp.
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM WITH MULTIPLE WAVELENGTHS
- Publication number 20080309943
- Publication date Dec 18, 2008
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE
- Publication number 20080158565
- Publication date Jul 3, 2008
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Methods for depth profiling in semiconductors using modulated optic...
- Publication number 20080151247
- Publication date Jun 26, 2008
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Modulated optical reflectance measurement system with enhanced sens...
- Publication number 20080074668
- Publication date Mar 27, 2008
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Probe beam profile modulated optical reflectance system and methods
- Publication number 20080036998
- Publication date Feb 14, 2008
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Combined modulated optical reflectance and electrical system for ul...
- Publication number 20070188761
- Publication date Aug 16, 2007
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system using UV probe
- Publication number 20070008541
- Publication date Jan 11, 2007
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system with multiple wavelengths
- Publication number 20060262314
- Publication date Nov 23, 2006
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring peak carrier concentration in ultra-shallow ju...
- Publication number 20060166385
- Publication date Jul 27, 2006
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system with multiple wavelengths
- Publication number 20060092425
- Publication date May 4, 2006
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Method and system for combined photothermal modulated reflectance a...
- Publication number 20050225765
- Publication date Oct 13, 2005
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring ion-implanted semiconductors with improved rep...
- Publication number 20050195399
- Publication date Sep 8, 2005
- Lena Nicolaides
- G01 - MEASURING TESTING
Information Patent Application
Ion implant monitoring through measurement of modulated optical res...
- Publication number 20050190369
- Publication date Sep 1, 2005
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
ION implant monitoring through measurement of modulated optical res...
- Publication number 20050083528
- Publication date Apr 21, 2005
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Photothermal system with spectroscopic pump and probe
- Publication number 20050062971
- Publication date Mar 24, 2005
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Position modulated optical reflectance measurement system for semic...
- Publication number 20050036136
- Publication date Feb 17, 2005
- Jon Opsal
- G01 - MEASURING TESTING
Information Patent Application
Characterization of ultra shallow junctions in semiconductor wafers
- Publication number 20040251927
- Publication date Dec 16, 2004
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Photothermal ultra-shallow junction monitoring system with UV pump
- Publication number 20040253751
- Publication date Dec 16, 2004
- Alex Salnik
- G01 - MEASURING TESTING
Information Patent Application
Modulated reflectance measurement system using UV probe
- Publication number 20040104352
- Publication date Jun 3, 2004
- Jon Opsal
- G01 - MEASURING TESTING

Lena Nicolaides

Person

Patents Grantslast 30 patents

3D structure inspection or metrology using deep learning

Training a neural network for defect detection in low resolution im...

All surface film metrology system

Apparatus and methods for combined brightfield, darkfield, and phot...

Apparatus and methods for combined brightfield, darkfield, and phot...

Systems and methods for enhancing inspection sensitivity of an insp...

Apparatus and methods for measuring properties in a TSV structure u...

In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Automated inline inspection of wafer edge strain profiles using rap...

Dopant metrology with information feedforward and feedback

Modulated reflectance measurement system using UV probe

Dopant metrology with information feedforward and feedback

LED solar illuminator

Measuring sheet resistance and other properties of a semiconductor

Measuring characteristics of ultra-shallow junctions

Methods for depth profiling in semiconductors using modulated optic...

Combined modulated optical reflectance and photoreflectance system

Methods for depth profiling in semiconductors using modulated optic...

Ion implant metrology system with fault detection and identification

Modulated reflectance measurement system using UV probe

Modulated reflectance measurement system with multiple wavelengths

Probe beam profile modulated optical reflectance system and methods

Combined modulated optical reflectance and electrical system for ul...

Modulated reflectance measurement system with multiple wavelengths

Method for measuring peak carrier concentration in ultra-shallow ju...

Modulated reflectance measurement system using UV probe

Method for measuring ion-implanted semiconductors with improved rep...

Photothermal system with spectroscopic pump and probe

Characterization of ultra shallow junctions in semiconductor wafers

Position modulated optical reflectance measurement system for semic...

Patents Applicationslast 30 patents

3D STRUCTURE INSPECTION OR METROLOGY USING DEEP LEARNING

TRAINING A NEURAL NETWORK FOR DEFECT DETECTION IN LOW RESOLUTION IM...

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

ALL SURFACE FILM METROLOGY SYSTEM

Systems and Methods for Enhancing Inspection Sensitivity of an Insp...

IN-LINE WAFER EDGE INSPECTION, WAFER PRE-ALIGNMENT, AND WAFER CLEANING

Automated Inline Inspection of Wafer Edge Strain Profiles Using Rap...

APPARATUS AND METHODS FOR COMBINED BRIGHTFIELD, DARKFIELD, AND PHOT...

LED Solar Illuminator

METHODS FOR DEPTH PROFILING IN SEMICONDUCTORS USING MODULATED OPTIC...

MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE

MODULATED REFLECTANCE MEASUREMENT SYSTEM WITH MULTIPLE WAVELENGTHS

MODULATED REFLECTANCE MEASUREMENT SYSTEM USING UV PROBE

Methods for depth profiling in semiconductors using modulated optic...

Modulated optical reflectance measurement system with enhanced sens...

Probe beam profile modulated optical reflectance system and methods

Combined modulated optical reflectance and electrical system for ul...

Modulated reflectance measurement system using UV probe

Modulated reflectance measurement system with multiple wavelengths

Method for measuring peak carrier concentration in ultra-shallow ju...

Modulated reflectance measurement system with multiple wavelengths

Method and system for combined photothermal modulated reflectance a...

Method for measuring ion-implanted semiconductors with improved rep...

Ion implant monitoring through measurement of modulated optical res...

ION implant monitoring through measurement of modulated optical res...

Photothermal system with spectroscopic pump and probe

Position modulated optical reflectance measurement system for semic...

Characterization of ultra shallow junctions in semiconductor wafers

Photothermal ultra-shallow junction monitoring system with UV pump

Modulated reflectance measurement system using UV probe