Leon Volfovski

Person

Pacifica, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Process kit ring adaptor
- Patent number 11,842,917
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an aligner station of a processing system
- Patent number 11,823,937
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 11,626,305
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Nicholas Michael Kopec
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Replaceable end effector contact pads, end effectors, and maintenan...
- Patent number 11,600,580
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Whitney Kroetz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-object capable loadlock system
- Patent number 11,211,269
- Issue date Dec 28, 2021
- Applied Materials, Inc.
- Andrew Paul Harbert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit ring adaptor
- Patent number 10,964,584
- Issue date Mar 30, 2021
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus, systems, and methods for temperature control of substrat...
- Patent number 10,736,182
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with heater
- Patent number 10,242,890
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Leon Volfovski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for substrate edge cleaning
- Patent number 10,217,650
- Issue date Feb 26, 2019
- Applied Materials, Inc.
- James Matthew Holden
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Temperature control apparatus including groove-routed optical fiber...
- Patent number 9,986,598
- Issue date May 29, 2018
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with feedthrough structure
- Patent number 9,706,605
- Issue date Jul 11, 2017
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support with temperature profile control
- Patent number 9,698,074
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature control apparatus including optical fiber hea...
- Patent number 9,698,041
- Issue date Jul 4, 2017
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with switchable multizone heater
- Patent number 9,538,583
- Issue date Jan 3, 2017
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for substrate edge cleaning
- Patent number 9,443,714
- Issue date Sep 13, 2016
- Applied Materials, Inc.
- James Matthew Holden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,550,031
- Issue date Oct 8, 2013
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,215,262
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,181,596
- Issue date May 22, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 8,146,530
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer edge cleaning
- Patent number 8,099,817
- Issue date Jan 24, 2012
- Applied Materials, Inc.
- Joseph Yudovsky
- B24 - GRINDING POLISHING
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,925,377
- Issue date Apr 12, 2011
- Applied Materials, Inc.
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer edge cleaning
- Patent number 7,900,311
- Issue date Mar 8, 2011
- Applied Materials, Inc.
- Joseph Yudovsky
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for installing a scrubber brush on a mandrel
- Patent number 7,779,527
- Issue date Aug 24, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,743,728
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool substrate throughput optimization
- Patent number 7,699,021
- Issue date Apr 20, 2010
- Sokudo Co., Ltd.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,694,647
- Issue date Apr 13, 2010
- Applied Materials, Inc.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Cluster tool architecture for processing a substrate
- Patent number 7,357,842
- Issue date Apr 15, 2008
- Sokudo Co., Ltd.
- Tetsuya Ishikawa
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and methods for handling a substrate
- Patent number 6,454,332
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Boris Govzman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
- Publication number 20240021458
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT
- Publication number 20230307273
- Publication date Sep 28, 2023
- Nicholas Michael Kopec
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROCESS KIT RING ADAPTOR
- Publication number 20210217650
- Publication date Jul 15, 2021
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
- Publication number 20210057256
- Publication date Feb 25, 2021
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-OBJECT CAPABLE LOADLOCK SYSTEM
- Publication number 20210020476
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Andrew Paul Harbert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT
- Publication number 20200411347
- Publication date Dec 31, 2020
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROCESS KIT RING ADAPTOR
- Publication number 20200373194
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Leon Volfovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS KIT ENCLOSURE SYSTEM
- Publication number 20200373190
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REPLACEABLE END EFFECTOR CONTACT PADS, END EFFECTORS, AND MAINTENAN...
- Publication number 20200273826
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Whitney Kroetz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING
- Publication number 20170018441
- Publication date Jan 19, 2017
- Applied Materials, Inc.
- JAMES MATTHEW HOLDEN
- B08 - CLEANING
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRAT...
- Publication number 20160007412
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER...
- Publication number 20160007411
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Matthew Busche
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEA...
- Publication number 20150357228
- Publication date Dec 10, 2015
- Applied Materials, Inc.
- Matthew Busche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED SUBSTRATE SUPPORT WITH TEMPERATURE PROFILE CONTROL
- Publication number 20150076135
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- NIR MERRY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING
- Publication number 20140251375
- Publication date Sep 11, 2014
- JAMES MATTHEW HOLDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER
- Publication number 20140197151
- Publication date Jul 17, 2014
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH FEEDTHROUGH STRUCTURE
- Publication number 20130256966
- Publication date Oct 3, 2013
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH TEMPERATURE CONTROL
- Publication number 20130087309
- Publication date Apr 11, 2013
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH HEATER
- Publication number 20130037532
- Publication date Feb 14, 2013
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120320361
- Publication date Dec 20, 2012
- Tetsuya Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH HEATER AND RAPID TEMPERATURE CHANGE
- Publication number 20120196242
- Publication date Aug 2, 2012
- Applied Materials, Inc.
- LEON VOLFOVSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20120180983
- Publication date Jul 19, 2012
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES
- Publication number 20120055916
- Publication date Mar 8, 2012
- Sokudo Co., Ltd.
- Leon Volfovski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER EDGE CLEANING
- Publication number 20110154590
- Publication date Jun 30, 2011
- Applied Materials, Inc.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090067956
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064928
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE
- Publication number 20090064929
- Publication date Mar 12, 2009
- Tetsuya Ishikawa
- G05 - CONTROLLING REGULATING
Information Patent Application
WAFER EDGE CLEANING
- Publication number 20090044831
- Publication date Feb 19, 2009
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR INSTALLING A SCRUBBER BRUSH ON A MANDREL
- Publication number 20090031516
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER EDGE CLEANING
- Publication number 20090031511
- Publication date Feb 5, 2009
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- B08 - CLEANING

Leon Volfovski

Person

Patents Grantslast 30 patents

Process kit enclosure system

Sensor-based correction of robot-held object

Process kit ring adaptor

Calibration of an aligner station of a processing system

Sensor-based correction of robot-held object

Replaceable end effector contact pads, end effectors, and maintenan...

Multi-object capable loadlock system

Process kit ring adaptor

Apparatus, systems, and methods for temperature control of substrat...

Substrate support with heater

Methods and apparatus for substrate edge cleaning

Temperature control apparatus including groove-routed optical fiber...

Substrate support with feedthrough structure

Heated substrate support with temperature profile control

Substrate temperature control apparatus including optical fiber hea...

Substrate support with switchable multizone heater

Methods and apparatus for substrate edge cleaning

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Wafer edge cleaning

Cluster tool architecture for processing a substrate

Wafer edge cleaning

Methods and apparatus for installing a scrubber brush on a mandrel

Cluster tool architecture for processing a substrate

Cluster tool substrate throughput optimization

Cluster tool architecture for processing a substrate

Cluster tool architecture for processing a substrate

Apparatus and methods for handling a substrate

Patents Applicationslast 30 patents

CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM

SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT

PROCESS KIT RING ADAPTOR

CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM

MULTI-OBJECT CAPABLE LOADLOCK SYSTEM

SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT

PROCESS KIT RING ADAPTOR

PROCESS KIT ENCLOSURE SYSTEM

REPLACEABLE END EFFECTOR CONTACT PADS, END EFFECTORS, AND MAINTENAN...

METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

APPARATUS, SYSTEMS, AND METHODS FOR TEMPERATURE CONTROL OF SUBSTRAT...

TEMPERATURE CONTROL APPARATUS INCLUDING GROOVE-ROUTED OPTICAL FIBER...

SUBSTRATE TEMPERATURE CONTROL APPARATUS INCLUDING OPTICAL FIBER HEA...

HEATED SUBSTRATE SUPPORT WITH TEMPERATURE PROFILE CONTROL

METHODS AND APPARATUS FOR SUBSTRATE EDGE CLEANING

SUBSTRATE SUPPORT WITH SWITCHABLE MULTIZONE HEATER

SUBSTRATE SUPPORT WITH FEEDTHROUGH STRUCTURE

SUBSTRATE SUPPORT WITH TEMPERATURE CONTROL

SUBSTRATE SUPPORT WITH HEATER

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

SUBSTRATE SUPPORT WITH HEATER AND RAPID TEMPERATURE CHANGE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATES

WAFER EDGE CLEANING

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE

WAFER EDGE CLEANING

METHODS AND APPARATUS FOR INSTALLING A SCRUBBER BRUSH ON A MANDREL

WAFER EDGE CLEANING