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Leonard C. Stevens JR.
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Poughquag, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
6,648,979
Issue date
Nov 18, 2003
International Business Machines Corporation
Michael F. Lofaro
B08 - CLEANING
Information
Patent Grant
Method and apparatus for monitoring polishing pad wear during proce...
Patent number
6,186,864
Issue date
Feb 13, 2001
International Business Machines Corporation
Thomas R. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Pad and roller assembly for cleaning semiconductor wafers
Patent number
6,125,496
Issue date
Oct 3, 2000
International Business Machines Corporation
Leonard Corbett Stevens
B08 - CLEANING
Information
Patent Grant
Acoustically agitated delivery
Patent number
6,106,374
Issue date
Aug 22, 2000
International Business Machines Corporation
Karl E. Boggs
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus of monitoring polishing pad wear during proces...
Patent number
6,045,434
Issue date
Apr 4, 2000
International Business Machines Corporation
Thomas R. Fisher
B24 - GRINDING POLISHING
Information
Patent Grant
Pad and roller assembly for cleaning semiconductor wafers
Patent number
5,813,082
Issue date
Sep 29, 1998
International Business Machines Corporation
Leonard C. Stevens
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for wafer cleaning
Publication number
20020096191
Publication date
Jul 25, 2002
International Business Machines Corporation
Michael F. Lofaro
H01 - BASIC ELECTRIC ELEMENTS