Leonard Wai Fung Kho

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for recovering fluid in immersion lithography
- Patent number 8,289,497
- Issue date Oct 16, 2012
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nozzle to help reduce the escape of immersion liquid from an immers...
- Patent number 8,068,209
- Issue date Nov 29, 2011
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for providing fluid for immersion lithography
- Patent number 8,054,448
- Issue date Nov 8, 2011
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for recovering liquid droplets in immersion li...
- Patent number 7,929,109
- Issue date Apr 19, 2011
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for recovering fluid for immersion lithography
- Patent number 7,751,026
- Issue date Jul 6, 2010
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas curtain type immersion lithography tool using porous material f...
- Patent number 7,576,833
- Issue date Aug 18, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography system and method having an immersion fluid c...
- Patent number 7,532,309
- Issue date May 12, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Non-contact pneumatic transfer for stages with small motion
- Patent number 7,375,800
- Issue date May 20, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for providing fluid for immersion lithography
- Patent number 7,292,313
- Issue date Nov 6, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for measuring displacement of a stage
- Patent number 7,283,200
- Issue date Oct 16, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Modular stage with reaction force cancellation
- Patent number 6,917,412
- Issue date Jul 12, 2005
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR RECOVERING FLUID IN IMMERSION LITHOGRAPHY
- Publication number 20130010271
- Publication date Jan 10, 2013
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...
- Publication number 20120262687
- Publication date Oct 18, 2012
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHODS TO RECOVER LIQUID IN IMMERSION LITHOGRAPHY
- Publication number 20120257179
- Publication date Oct 11, 2012
- Nikon Corporation
- Derek COON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING R...
- Publication number 20120062866
- Publication date Mar 15, 2012
- NIKON CORPORATION
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for providing fluid for immersion lithography
- Publication number 20120013861
- Publication date Jan 19, 2012
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for recovering liquid droplets in immersion li...
- Publication number 20110164239
- Publication date Jul 7, 2011
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electromagnetic Coil Design for Improved Thermal Performance
- Publication number 20100271159
- Publication date Oct 28, 2010
- NIKON CORPORATION
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for recovering fluid for immersion lithography
- Publication number 20100231876
- Publication date Sep 16, 2010
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL LIQUID STAGNATION IN IMMERSION LIQU...
- Publication number 20100220301
- Publication date Sep 2, 2010
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ERROR REDUCTION BY COOLING
- Publication number 20100186942
- Publication date Jul 29, 2010
- Alton H. Phillips
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
- Publication number 20100134773
- Publication date Jun 3, 2010
- NIKON CORPORATION
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...
- Publication number 20100097585
- Publication date Apr 22, 2010
- Nikon Corporation
- Alex Ka Tim POON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for providing fluid for immersion lithography
- Publication number 20090296053
- Publication date Dec 3, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for recovering fluid in immersion lithography
- Publication number 20090237631
- Publication date Sep 24, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography apparatus and method having movable liquid di...
- Publication number 20090231560
- Publication date Sep 17, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas curtain type immersion lithography tool using porous material f...
- Publication number 20090002648
- Publication date Jan 1, 2009
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nozzle to help reduce the escape of immersion liquid from an immers...
- Publication number 20080231822
- Publication date Sep 25, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for reducing the escape of immersion liquid f...
- Publication number 20080231823
- Publication date Sep 25, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for keeping immersion fluid adjacent to an op...
- Publication number 20080225246
- Publication date Sep 18, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus, systems and methods for removing liquid from workpiece d...
- Publication number 20080225248
- Publication date Sep 18, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for removing immersion liquid from substrates...
- Publication number 20080212050
- Publication date Sep 4, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and methods for minimizing force variation from immersion...
- Publication number 20080198348
- Publication date Aug 21, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography system and method having a wafer chuck made o...
- Publication number 20080100812
- Publication date May 1, 2008
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus that includes a phase change circulation system...
- Publication number 20080073563
- Publication date Mar 27, 2008
- NIKON CORPORATION
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography system and method having an immersion fluid c...
- Publication number 20070279608
- Publication date Dec 6, 2007
- Nikon Corporation
- Alex Ka Tim Poon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Offset gap control for electromagnetic devices
- Publication number 20050162802
- Publication date Jul 28, 2005
- Nikon Research Corporation of America
- Leonard Wai Fung Kho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Leonard Wai Fung Kho

Person

Patents Grantslast 30 patents

Apparatus and methods for recovering fluid in immersion lithography

Nozzle to help reduce the escape of immersion liquid from an immers...

Apparatus and method for providing fluid for immersion lithography

Apparatus and method for recovering liquid droplets in immersion li...

Apparatus and method for recovering fluid for immersion lithography

Gas curtain type immersion lithography tool using porous material f...

Immersion lithography system and method having an immersion fluid c...

Non-contact pneumatic transfer for stages with small motion

Apparatus and method for providing fluid for immersion lithography

System and method for measuring displacement of a stage

Modular stage with reaction force cancellation

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR RECOVERING FLUID IN IMMERSION LITHOGRAPHY

APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OP...

APPARATUS AND METHODS TO RECOVER LIQUID IN IMMERSION LITHOGRAPHY

MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING R...

Apparatus and method for providing fluid for immersion lithography

Apparatus and method for recovering liquid droplets in immersion li...

Electromagnetic Coil Design for Improved Thermal Performance

Apparatus and method for recovering fluid for immersion lithography

APPARATUS AND METHOD TO CONTROL LIQUID STAGNATION IN IMMERSION LIQU...

RETICLE ERROR REDUCTION BY COOLING

APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...

APPARATUS AND METHOD TO CONTROL VACUUM AT POROUS MATERIAL USING MUL...

Apparatus and method for providing fluid for immersion lithography

Apparatus and methods for recovering fluid in immersion lithography

Immersion lithography apparatus and method having movable liquid di...

Gas curtain type immersion lithography tool using porous material f...

Nozzle to help reduce the escape of immersion liquid from an immers...

Apparatus and methods for reducing the escape of immersion liquid f...

Apparatus and methods for keeping immersion fluid adjacent to an op...

Apparatus, systems and methods for removing liquid from workpiece d...

Apparatus and methods for removing immersion liquid from substrates...

Apparatus and methods for minimizing force variation from immersion...

Immersion lithography system and method having a wafer chuck made o...

Exposure apparatus that includes a phase change circulation system...

Immersion lithography system and method having an immersion fluid c...

Offset gap control for electromagnetic devices