Leonid Poslavsky

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Automatic wavelength or angle pruning for optical metrology
- Patent number 11,175,589
- Issue date Nov 16, 2021
- KLA Corporation
- Lie-Quan Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic selection of sample values for optical metrology
- Patent number 10,895,810
- Issue date Jan 19, 2021
- KLA Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 10,770,362
- Issue date Sep 8, 2020
- KLA Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Library expansion system, method, and computer program product for...
- Patent number 10,648,793
- Issue date May 12, 2020
- KLA-Tencor Corporation
- Leonid Poslavsky
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology system calibration refinement
- Patent number 10,605,722
- Issue date Mar 31, 2020
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Automatic determination of fourier harmonic order for computation o...
- Patent number 10,481,088
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- Mark Backues
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 10,410,935
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method, and computer program product for automatically dete...
- Patent number 10,393,647
- Issue date Aug 27, 2019
- KLA-Tencor Corporation
- Qiang Jimmy Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Dynamic removal of correlation of highly correlated parameters for...
- Patent number 10,386,729
- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Lie-Quan Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model based measurement systems with improved electromagnetic solve...
- Patent number 10,345,095
- Issue date Jul 9, 2019
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology system, method, and computer program product employing au...
- Patent number 10,190,868
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Liequan Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Signal response metrology based on measurements of proxy structures
- Patent number 10,151,986
- Issue date Dec 11, 2018
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectral matching based calibration
- Patent number 10,088,413
- Issue date Oct 2, 2018
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Calculated electrical performance metrics for process monitoring an...
- Patent number 10,079,183
- Issue date Sep 18, 2018
- KLA-Tenor Corporation
- Xiang Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Confined illumination for small spot size metrology
- Patent number 10,006,865
- Issue date Jun 26, 2018
- KLA-Tencor Corporation
- Derrick Shaughnessy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized spatial modeling for optical CD metrology
- Patent number 9,915,522
- Issue date Mar 13, 2018
- KLA-Tencor Corporation
- Peilin Jiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Feed forward of metrology data in a metrology system
- Patent number 9,903,711
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Ady Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology system calibration refinement
- Patent number 9,857,291
- Issue date Jan 2, 2018
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Grant
Confined illumination for small spot size metrology
- Patent number 9,719,932
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Derrick Shaughnessy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-oscillator, continuous Cody-Lorentz model of optical dispersion
- Patent number 9,664,734
- Issue date May 30, 2017
- KLA-Tencor Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calculation method for local film stress measurements using local f...
- Patent number 9,625,823
- Issue date Apr 18, 2017
- KLA-Tencor Corporation
- Torsten R. Kaack
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Accurate and fast neural network training for library-based critica...
- Patent number 9,607,265
- Issue date Mar 28, 2017
- KLA-Tencor Corporation
- Wen Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 9,595,481
- Issue date Mar 14, 2017
- KLA-Tencor Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology through use of feed forward feed sideways and measurement...
- Patent number 9,559,019
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- Michael Adel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device models including re-usable sub-structures
- Patent number 9,553,033
- Issue date Jan 24, 2017
- KLA-Tencor Corporation
- Jonathan Iloreta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of composition for thin films
- Patent number 9,442,063
- Issue date Sep 13, 2016
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Grant
Multi-model metrology
- Patent number 9,412,673
- Issue date Aug 9, 2016
- KLA-Tencor Corporation
- In-Kyo Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Model for optical dispersion of high-K dielectrics including defects
- Patent number 9,405,290
- Issue date Aug 2, 2016
- KLA-Tencor Corporation
- Natalia Malkova
- G05 - CONTROLLING REGULATING
Information Patent Grant
Meta-model based measurement refinement
- Patent number 9,347,872
- Issue date May 24, 2016
- KLA-Tencor Corporation
- Leonid Poslavsky
- G01 - MEASURING TESTING
Information Patent Grant
Secondary target design for optical measurements
- Patent number 9,311,431
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- Sungchul Yoo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY SYSTEM CALIBRATION REFINEMENT
- Publication number 20180100796
- Publication date Apr 12, 2018
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
Multi-Oscillator, Continuous Cody-Lorentz Model Of Optical Dispersion
- Publication number 20160341792
- Publication date Nov 24, 2016
- KLA-Tencor Corporation
- Natalia Malkova
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AU...
- Publication number 20160320315
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Liequan Lee
- G01 - MEASURING TESTING
Information Patent Application
MULTI-MODEL METROLOGY
- Publication number 20160322267
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- In-Kyo Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Feed Forward of Metrology Data in a Metrology System
- Publication number 20160290796
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Ady Levy
- G01 - MEASURING TESTING
Information Patent Application
Signal Response Metrology Based On Measurements Of Proxy Structures
- Publication number 20160003609
- Publication date Jan 7, 2016
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
LIBRARY EXPANSION SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR...
- Publication number 20150330770
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Leonid Poslavsky
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Device Models Including Re-Usable Sub-Structures
- Publication number 20150199463
- Publication date Jul 16, 2015
- KLA-Tencor Corporation
- Jonathan Iloreta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY
- Publication number 20150142395
- Publication date May 21, 2015
- Meng Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...
- Publication number 20150112624
- Publication date Apr 23, 2015
- KLA-Tencor Corporation
- Michael Adel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-MODEL METROLOGY
- Publication number 20150058813
- Publication date Feb 26, 2015
- KLA-Tencor Corporation
- In-Kyo Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Calculated Electrical Performance Metrics For Process Monitoring An...
- Publication number 20150006097
- Publication date Jan 1, 2015
- KLA-Tencor Corporation
- Xiang Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...
- Publication number 20140358476
- Publication date Dec 4, 2014
- Mark Backues
- G01 - MEASURING TESTING
Information Patent Application
DYNAMIC REMOVAL OF CORRELATION OF HIGHLY CORRELATED PARAMETERS FOR...
- Publication number 20140358488
- Publication date Dec 4, 2014
- Lie-Quan Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AUTOMATIC WAVELENGTH OR ANGLE PRUNING FOR OPTICAL METROLOGY
- Publication number 20140358485
- Publication date Dec 4, 2014
- Lie-Quan Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SYSTEM CALIBRATION REFINEMENT
- Publication number 20140340682
- Publication date Nov 20, 2014
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF ELECTROMAGNETIC MODELING OF FINITE STRUCTURES AND FINITE...
- Publication number 20140222380
- Publication date Aug 7, 2014
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Application
Optical System Polarizer Calibration
- Publication number 20140043608
- Publication date Feb 13, 2014
- KLA-Tencor Corporation
- Johannes D. de Veer
- G01 - MEASURING TESTING
Information Patent Application
ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICA...
- Publication number 20140032463
- Publication date Jan 30, 2014
- Wen Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TECHNIQUES FOR OPTIMIZED SCATTEROMETRY
- Publication number 20130158948
- Publication date Jun 20, 2013
- Jonathan Iloreta
- G01 - MEASURING TESTING
Information Patent Application
LIBRARY GENERATION WITH DERIVATIVES IN OPTICAL METROLOGY
- Publication number 20130158957
- Publication date Jun 20, 2013
- Lie-Quan Lee
- G01 - MEASURING TESTING
Information Patent Application
Spectral Matching Based Calibration
- Publication number 20130132021
- Publication date May 23, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
Secondary Target Design for Optical Measurements
- Publication number 20130116978
- Publication date May 9, 2013
- KLA-TENCOR CORPORATION
- Sungchul Yoo
- G01 - MEASURING TESTING
Information Patent Application
High Throughput Thin Film Characterization And Defect Detection
- Publication number 20130083320
- Publication date Apr 4, 2013
- KLA-Tencor Corporation
- Xiang Gao
- G01 - MEASURING TESTING
Information Patent Application
MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY
- Publication number 20130010296
- Publication date Jan 10, 2013
- KLA-Tencor Corporation
- Hidong Kwak
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT OF COMPOSITION FOR THIN FILMS
- Publication number 20130006539
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Application
Optical System Polarizer Calibration
- Publication number 20120320377
- Publication date Dec 20, 2012
- KLA-Tencor Corporation
- Johannes D. de Veer
- G01 - MEASURING TESTING
Information Patent Application
Accurate and Fast Neural network Training for Library-Based Critica...
- Publication number 20120226644
- Publication date Sep 6, 2012
- Wen Jin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE
- Publication number 20120086940
- Publication date Apr 12, 2012
- Meng-Fu Shih
- G01 - MEASURING TESTING
Information Patent Application
METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...
- Publication number 20100017005
- Publication date Jan 21, 2010
- KLA-Tencor Corporation
- Michael Adel
- H01 - BASIC ELECTRIC ELEMENTS

Leonid Poslavsky

Person

Patents Grantslast 30 patents

Automatic wavelength or angle pruning for optical metrology

Automatic selection of sample values for optical metrology

Dispersion model for band gap tracking

Library expansion system, method, and computer program product for...

Metrology system calibration refinement

Automatic determination of fourier harmonic order for computation o...

Dispersion model for band gap tracking

System, method, and computer program product for automatically dete...

Dynamic removal of correlation of highly correlated parameters for...

Model based measurement systems with improved electromagnetic solve...

Metrology system, method, and computer program product employing au...

Signal response metrology based on measurements of proxy structures

Spectral matching based calibration

Calculated electrical performance metrics for process monitoring an...

Confined illumination for small spot size metrology

Optimized spatial modeling for optical CD metrology

Feed forward of metrology data in a metrology system

Metrology system calibration refinement

Confined illumination for small spot size metrology

Multi-oscillator, continuous Cody-Lorentz model of optical dispersion

Calculation method for local film stress measurements using local f...

Accurate and fast neural network training for library-based critica...

Dispersion model for band gap tracking

Metrology through use of feed forward feed sideways and measurement...

Semiconductor device models including re-usable sub-structures

Measurement of composition for thin films

Multi-model metrology

Model for optical dispersion of high-K dielectrics including defects

Meta-model based measurement refinement

Secondary target design for optical measurements

Patents Applicationslast 30 patents

METROLOGY SYSTEM CALIBRATION REFINEMENT

Multi-Oscillator, Continuous Cody-Lorentz Model Of Optical Dispersion

METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AU...

MULTI-MODEL METROLOGY

Feed Forward of Metrology Data in a Metrology System

Signal Response Metrology Based On Measurements Of Proxy Structures

LIBRARY EXPANSION SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR...

Semiconductor Device Models Including Re-Usable Sub-Structures

AUTOMATIC SELECTION OF SAMPLE VALUES FOR OPTICAL METROLOGY

METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...

MULTI-MODEL METROLOGY

Calculated Electrical Performance Metrics For Process Monitoring An...

AUTOMATIC DETERMINATION OF FOURIER HARMONIC ORDER FOR COMPUTATION O...

DYNAMIC REMOVAL OF CORRELATION OF HIGHLY CORRELATED PARAMETERS FOR...

AUTOMATIC WAVELENGTH OR ANGLE PRUNING FOR OPTICAL METROLOGY

METROLOGY SYSTEM CALIBRATION REFINEMENT

METHOD OF ELECTROMAGNETIC MODELING OF FINITE STRUCTURES AND FINITE...

Optical System Polarizer Calibration

ACCURATE AND FAST NEURAL NETWORK TRAINING FOR LIBRARY-BASED CRITICA...

TECHNIQUES FOR OPTIMIZED SCATTEROMETRY

LIBRARY GENERATION WITH DERIVATIVES IN OPTICAL METROLOGY

Spectral Matching Based Calibration

Secondary Target Design for Optical Measurements

High Throughput Thin Film Characterization And Defect Detection

MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY

MEASUREMENT OF COMPOSITION FOR THIN FILMS

Optical System Polarizer Calibration

Accurate and Fast Neural network Training for Library-Based Critica...

METHOD OF DETERMINING AN ASYMMETRIC PROPERTY OF A STRUCTURE

METROLOGY THROUGH USE OF FEED FORWARD FEED SIDEWAYS AND MEASUREMENT...