Li-Min Chen

Person

Norwalk, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,920,141
- Issue date Feb 16, 2021
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,472,567
- Issue date Nov 12, 2019
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aqueous formulations for removing metal hard mask and post-etch res...
- Patent number 10,138,117
- Issue date Nov 27, 2018
- Entegris, Inc.
- Li-Min Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compositions for cleaning III-V semiconductor materials and methods...
- Patent number 9,765,288
- Issue date Sep 19, 2017
- Entegris, Inc.
- Emanuel I. Cooper
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 9,546,321
- Issue date Jan 17, 2017
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
AQUEOUS FORMULATIONS FOR REMOVING METAL HARD MASK AND POST-ETCH RES...
- Publication number 20160185595
- Publication date Jun 30, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160130500
- Publication date May 12, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160032186
- Publication date Feb 4, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS FOR CLEANING III-V SEMICONDUCTOR MATERIALS AND METHOD...
- Publication number 20150344825
- Publication date Dec 3, 2015
- Entegris, Inc.
- Emanuel I. COOPER
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION
- Publication number 20150162213
- Publication date Jun 11, 2015
- Advanced Technology Materials, Inc.
- Tianniu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20150027978
- Publication date Jan 29, 2015
- Advanced Technology Materials, Inc.
- Jeffrey A. Barnes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Li-Min Chen

Person

Patents Grantslast 30 patents

Compositions and methods for selectively etching titanium nitride

Compositions and methods for selectively etching titanium nitride

Aqueous formulations for removing metal hard mask and post-etch res...

Compositions for cleaning III-V semiconductor materials and methods...

Compositions and methods for selectively etching titanium nitride

Patents Applicationslast 30 patents

AQUEOUS FORMULATIONS FOR REMOVING METAL HARD MASK AND POST-ETCH RES...

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE

COMPOSITIONS FOR CLEANING III-V SEMICONDUCTOR MATERIALS AND METHOD...

FORMULATIONS FOR WET ETCHING NIPT DURING SILICIDE FABRICATION

COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE