Liang Meng

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
RF tuning systems including tuning circuits having impedances for s...
- Patent number 11,183,368
- Issue date Nov 23, 2021
- Lam Research Corporation
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing RF power in etch process to enhance tungsten gapfill perfor...
- Patent number 10,395,944
- Issue date Aug 27, 2019
- Lam Research Corporation
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pulsing RF power in etch process to enhance tungsten gapfill perfor...
- Patent number 9,978,610
- Issue date May 22, 2018
- Lam Research Corporation
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...
- Publication number 20240203711
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...
- Publication number 20220044909
- Publication date Feb 10, 2022
- LAM RESEARCH CORPORATION
- David French
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20220037135
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...
- Publication number 20200043703
- Publication date Feb 6, 2020
- LAM RESEARCH CORPORATION
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...
- Publication number 20180254195
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR CONTROLLING TRANSITIONS BETWEEN CONTINU...
- Publication number 20170330764
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Canfeng Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...
- Publication number 20170053811
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Waikit Fung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS
- Publication number 20160013020
- Publication date Jan 14, 2016
- LAM RESEARCH CORPORATION
- Kaihan Ashtiani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

RF tuning systems including tuning circuits having impedances for s...

Pulsing RF power in etch process to enhance tungsten gapfill perfor...

Pulsing RF power in etch process to enhance tungsten gapfill perfor...

Patents Applicationslast 30 patents

RF SIGNAL PARAMETER MEASUREMENT IN AN INTEGRATED CIRCUIT FABRICATIO...

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

RF TUNING SYSTEMS INCLUDING TUNING CIRCUITS HAVING IMPEDANCES FOR S...

PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...

METHODS AND APPARATUSES FOR CONTROLLING TRANSITIONS BETWEEN CONTINU...

PULSING RF POWER IN ETCH PROCESS TO ENHANCE TUNGSTEN GAPFILL PERFOR...

SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS