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Lie-Yea Cheng
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Palo Alto, CA, US
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Patent Grant
Method of depositing and amorphous fluorocarbon film using HDP-CVD
Patent number
6,211,065
Issue date
Apr 3, 2001
Applied Materials, Inc.
Ming Xi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...