Lingyan SONG

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Danbury, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Aqueous and semi-aqueous cleaners for the removal of post-etch resi...
- Patent number 11,978,622
- Issue date May 7, 2024
- Entegris, Inc.
- Lingyan Song
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,920,141
- Issue date Feb 16, 2021
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods for selectively etching titanium nitride
- Patent number 10,472,567
- Issue date Nov 12, 2019
- Entegris, Inc.
- Li-Min Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-reflective coating cleaning and post-etch residue removal comp...
- Patent number 10,460,954
- Issue date Oct 29, 2019
- Entegris, Inc.
- Emanuel I. Cooper
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ANTI-REFLECTIVE COATING CLEANING AND POST-ETCH RESIDUE REMOVAL COMP...
- Publication number 20170200619
- Publication date Jul 13, 2017
- Entegris, Inc.
- Emanuel I. COOPER
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
AQUEOUS AND SEMI-AQUEOUS CLEANERS FOR THE REMOVAL OF POST-ETCH RESI...
- Publication number 20170200601
- Publication date Jul 13, 2017
- Entegris, Inc.
- Lingyan SONG
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160130500
- Publication date May 12, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
- Publication number 20160032186
- Publication date Feb 4, 2016
- Advanced Technology Materials, Inc.
- Li-Min CHEN
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...