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Patents Grants
last 30 patents
Information
Patent Grant
Methods for fabricating integrated circuits having device contacts
Patent number
9,443,761
Issue date
Sep 13, 2016
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wei Shao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit system employing low-k dielectrics and method of...
Patent number
8,358,007
Issue date
Jan 22, 2013
GLOBALFOUNDRIES Singapore Pte. Ltd.
Dong Kyun Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit hard mask processing system
Patent number
8,018,061
Issue date
Sep 13, 2011
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlled low-k via etch for Cu interconnections
Patent number
7,906,426
Issue date
Mar 15, 2011
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method to prevent charge damage from e-beam curing pr...
Patent number
7,678,586
Issue date
Mar 16, 2010
Chartered Semiconductor Manufacturing, Ltd.
Huang Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Integrated circuit manufacturing method using hard mask
Patent number
7,615,484
Issue date
Nov 10, 2009
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protruded contact and insertion of inter-layer-dielectric material...
Patent number
7,601,607
Issue date
Oct 13, 2009
Chartered Semiconductor Manufacturing, Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to fabricate aligned dual damascene openings
Patent number
7,372,156
Issue date
May 13, 2008
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal barrier cap fabrication by polymer lift-off
Patent number
7,323,408
Issue date
Jan 29, 2008
Chartered Semiconductor Manufacturing Ltd.
Beichao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method for fabricating a bond pad structure
Patent number
7,276,797
Issue date
Oct 2, 2007
Chartered Semiconductor Manufacturing Ltd.
Zhang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabrication of a die oxide ring
Patent number
7,276,440
Issue date
Oct 2, 2007
Chartered Semiconductor Manufacturing Ltd.
Fan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-patterning of photo-active dielectric materials for interconne...
Patent number
7,256,136
Issue date
Aug 14, 2007
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal barrier cap fabrication by polymer lift-off
Patent number
7,153,766
Issue date
Dec 26, 2006
Chartered Semiconductor Manufacturing Ltd.
Beichao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-patterning of photo-active dielectric materials for interconne...
Patent number
7,012,022
Issue date
Mar 14, 2006
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method for fabricating a bond pad structure
Patent number
6,998,335
Issue date
Feb 14, 2006
Chartered Semiconductor Manufacturing, Ltd.
Zhang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit with simultaneous fabrication of dual damascene...
Patent number
6,995,087
Issue date
Feb 7, 2006
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to fabricate aligned dual damascene openings
Patent number
6,967,156
Issue date
Nov 22, 2005
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED CIRCUITS HAVING DEVICE CONTACTS AND METHODS FOR FABRICAT...
Publication number
20160035623
Publication date
Feb 4, 2016
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Wei Shao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM EMPLOYING LOW-K DIELECTRICS AND METHOD OF...
Publication number
20100314763
Publication date
Dec 16, 2010
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Dong Kyun Sohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RELIABLE INTERCONNECT INTEGRATION
Publication number
20100109155
Publication date
May 6, 2010
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Huang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT HARD MASK PROCESSING SYSTEM
Publication number
20100013104
Publication date
Jan 21, 2010
Chartered Semiconductor Manufacturing LTD.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT HARD MASK PROCESSING SYSTEM
Publication number
20080265409
Publication date
Oct 30, 2008
Chartered Semiconductor Manufacturing LTD.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of controlled low-k via etch for Cu interconnections
Publication number
20080258308
Publication date
Oct 23, 2008
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM WITH CARBON ENHANCEMENT
Publication number
20080230907
Publication date
Sep 25, 2008
Chartered Semiconductor Manufacturing LTD.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protruded contact and insertion of inter-layer-dielectric material...
Publication number
20070264820
Publication date
Nov 15, 2007
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure and method to prevent charge damage from e-beam curing pr...
Publication number
20070134941
Publication date
Jun 14, 2007
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
Huang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Self-patterning of photo-active dielectric materials for interconne...
Publication number
20060128156
Publication date
Jun 15, 2006
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal barrier cap fabrication by polymer lift-off
Publication number
20060088995
Publication date
Apr 27, 2006
Chartered Semiconductor Manufacturing Ltd.
Beichao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure and method for fabricating a bond pad structure
Publication number
20060071350
Publication date
Apr 6, 2006
Zhang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to fabricate aligned dual damacene openings
Publication number
20060003573
Publication date
Jan 5, 2006
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Barrier metal cap structure on copper lines and vias
Publication number
20050191851
Publication date
Sep 1, 2005
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of fabrication of a die oxide ring
Publication number
20050127495
Publication date
Jun 16, 2005
Chartered Semiconductor Manufacturing Ltd.
Fan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Structure and method for fabricating a bond pad structure
Publication number
20050127530
Publication date
Jun 16, 2005
Zhang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Self-patterning of photo-active dielectric materials for interconne...
Publication number
20050093158
Publication date
May 5, 2005
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method to fabricate aligned dual damascene openings
Publication number
20050090095
Publication date
Apr 28, 2005
Chartered Semiconductor Manufacturing Ltd.
Yeow Kheng Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal barrier cap fabrication by polymer lift-off
Publication number
20040137709
Publication date
Jul 15, 2004
Chartered Semiconductor Manufacturing Ltd.
Beichao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated circuit with simultaneous fabrication of dual damascene...
Publication number
20040121585
Publication date
Jun 24, 2004
Chartered Semiconductor Manufacturing LTD.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Barrier metal cap structure on copper lines and vias
Publication number
20040048468
Publication date
Mar 11, 2004
Chartered Semiconductor Manufacturing Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS