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Lothar Bauch
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for determining overlap process windows in semico...
Patent number
9,099,353
Issue date
Aug 4, 2015
GLOBALFOUNDRIES Inc.
Lothar Bauch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for determining overlap process windows in semico...
Patent number
8,940,555
Issue date
Jan 27, 2015
GLOBALFOUNDRIES Inc.
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photolithographic mask having half tone main features and perpendic...
Patent number
7,465,522
Issue date
Dec 16, 2008
Infineon Technologies AG
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting positioning errors of circuit patterns during...
Patent number
7,084,962
Issue date
Aug 1, 2006
Infineon Technologies AG
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photolithographic mask
Patent number
7,078,133
Issue date
Jul 18, 2006
Infineon Technologies AG
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stacked via with specially designed landing pad for integrated semi...
Patent number
6,737,748
Issue date
May 18, 2004
Infineon Technologies AG
Lothar Bauch
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING OVERLAP PROCESS WINDOWS IN SEMICO...
Publication number
20150140695
Publication date
May 21, 2015
GLOBALFOUNDRIES INC.
Lothar Bauch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING OVERLAP PROCESS WINDOWS IN SEMICO...
Publication number
20140065734
Publication date
Mar 6, 2014
GLOBALFOUNDRIES INC.
Lothar Bauch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Hard Mask Layer Stack And A Method Of Patterning
Publication number
20070243707
Publication date
Oct 18, 2007
QIMONDA AG
Dirk Manger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and a method and mask for forming a device
Publication number
20070218627
Publication date
Sep 20, 2007
Ludovic Lattard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for transferring structures from a photomask into a photores...
Publication number
20060257794
Publication date
Nov 16, 2006
Lars Voelkel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithography mask and lithography system for direction-dependent exp...
Publication number
20050153216
Publication date
Jul 14, 2005
Christian Crell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for detecting positioning errors of circuit patterns during...
Publication number
20050068515
Publication date
Mar 31, 2005
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photolithographic mask
Publication number
20040256356
Publication date
Dec 23, 2004
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photolithographic mask
Publication number
20030152846
Publication date
Aug 14, 2003
Lothar Bauch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stacked via with specially designed landing pad for integrated semi...
Publication number
20020117759
Publication date
Aug 29, 2002
Lothar Bauch
H01 - BASIC ELECTRIC ELEMENTS