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Lukas Urban
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Princeton, NJ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer carrier having retention pockets with compound radii for chem...
Patent number
11,248,295
Issue date
Feb 15, 2022
Veeco Instruments Inc.
Sandeep Krishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafter carrier for chemical vapor deposition systems
Patent number
10,316,412
Issue date
Jun 11, 2019
Veeco Instruments Inc.
Sandeep Krishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer carrier having provisions for improving heating uniformity in...
Patent number
10,167,571
Issue date
Jan 1, 2019
Veeco Instruments Inc.
Sandeep Krishnan
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer carrier having retention pockets with compound radii for chem...
Patent number
10,145,013
Issue date
Dec 4, 2018
Veeco Instruments Inc.
Sandeep Krishnan
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
WAFER CARRIER HAVING RETENTION POCKETS WITH COMPOUND RADII FOR CHEM...
Publication number
20190169745
Publication date
Jun 6, 2019
VEECO INSTRUMENTS INC.
Sandeep Krishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLANETARY WAFER CARRIERS
Publication number
20170076972
Publication date
Mar 16, 2017
VEECO INSTRUMENTS INC.
Sandeep Krishnan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS-SPECIFIC WAFER CARRIER CORRECTION TO IMPROVE THERMAL UNIFOR...
Publication number
20170053049
Publication date
Feb 23, 2017
VEECO INSTRUMENTS INC.
Lukas Urban
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CARRIER HAVING RETENTION POCKETS WITH COMPOUND RADII FOR CHEM...
Publication number
20150211148
Publication date
Jul 30, 2015
VEECO INSTRUMENTS, INC.
Sandeep Krishnan
C30 - CRYSTAL GROWTH
Information
Patent Application
WAFER CARRIER HAVING PROVISIONS FOR IMPROVING HEATING UNIFORMITY IN...
Publication number
20140261187
Publication date
Sep 18, 2014
Sandeep Krishnan
C30 - CRYSTAL GROWTH
Information
Patent Application
AUTOMATED PROCESS CHAMBER CLEANING IN MATERIAL DEPOSITION SYSTEMS
Publication number
20130298831
Publication date
Nov 14, 2013
Bassam Shamoun
A46 - BRUSHWARE
Information
Patent Application
WAFTER CARRIER FOR CHEMICAL VAPOR DEPOSITION SYSTEMS
Publication number
20130276704
Publication date
Oct 24, 2013
Sandeep Krishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CARRIER WITH THERMAL FEATURES
Publication number
20130065403
Publication date
Mar 14, 2013
Ajit Paranjpe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...