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Lun Tsuei

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  • Mountain View, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas distribution blocker apparatus
    • Patent number 9,714,465
    • Issue date Jul 25, 2017
    • Applied Materials, Inc.
    • Lun Tsuei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for etching semiconductor wafers
    • Patent number 8,333,842
    • Issue date Dec 18, 2012
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Slit valve
    • Patent number 7,806,383
    • Issue date Oct 5, 2010
    • Applied Materials, Inc.
    • Toan Q. Tran
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Heated gas distribution plate for a processing chamber
    • Patent number 6,946,033
    • Issue date Sep 20, 2005
    • Applied Materials Inc.
    • Lun Tsuei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Mixing Energized and Non-Energized Gases for Silicon Nitride Deposi...
    • Publication number 20120009803
    • Publication date Jan 12, 2012
    • Applied Materials, Inc.
    • Kee Bum Jung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD FOR PREVENTING PROCESS SYSTEM CONTAMINATION
    • Publication number 20100151127
    • Publication date Jun 17, 2010
    • Applied Materials, Inc.
    • Tom K. Cho
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DISTRIBUTION BLOCKER APPARATUS
    • Publication number 20100136216
    • Publication date Jun 3, 2010
    • Applied Materials, Inc.
    • Lun Tsuei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADJUSTABLE GAS DISTRIBUTION APPARATUS
    • Publication number 20100112212
    • Publication date May 6, 2010
    • Applied Materials, Inc.
    • Lin Zhang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTIPLE GAS FEED APPARATUS AND METHOD
    • Publication number 20100104754
    • Publication date Apr 29, 2010
    • Applied Materials, Inc.
    • ALAN TSO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR FABRICATING FACEPLATE OF SEMICONDUCTOR APPARATUS
    • Publication number 20100071210
    • Publication date Mar 25, 2010
    • Applied Materials, Inc.
    • TIEN FAK TAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR ETCHING SEMICONDUCTOR WAFERS
    • Publication number 20090283217
    • Publication date Nov 19, 2009
    • Applied Materials, Inc.
    • DMITRY LUBOMIRSKY
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COUNTER-BALANCED SUBSTRATE SUPPORT
    • Publication number 20090120584
    • Publication date May 14, 2009
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MANIFOLD ASSEMBLY
    • Publication number 20090000550
    • Publication date Jan 1, 2009
    • Applied Materials, Inc.
    • Toan Q. Tran
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    SLIT VALVE
    • Publication number 20080296304
    • Publication date Dec 4, 2008
    • Applied Materials, Inc.
    • Toan Q. Tran
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Mixing energized and non-energized gases for silicon nitride deposi...
    • Publication number 20060162661
    • Publication date Jul 27, 2006
    • APPLIED MATERIALS, INC.
    • Kee Bum Jung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Edge flow faceplate for improvement of CVD film properties
    • Publication number 20050126484
    • Publication date Jun 16, 2005
    • APPLIED MATERIALS, INC., A Delaware corporation
    • Maosheng Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods for operating a chemical vapor deposition chamber using a h...
    • Publication number 20040052969
    • Publication date Mar 18, 2004
    • APPLIED MATERIALS, INC.
    • Ju-Hyung Lee
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Heated gas distribution plate for a processing chamber
    • Publication number 20040050492
    • Publication date Mar 18, 2004
    • APPLIED MATERIALS, INC.
    • Lun Tsuei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...