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Lyudmila Stone

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  • Lynnfield, MA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SYSTEM AND APPARATUS FOR ENHANCED SUBSTRATE HEATING AND RAPID SUBST...
    • Publication number 20200381271
    • Publication date Dec 3, 2020
    • Applied Materials, Inc.
    • Dawei Sun
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
    • Publication number 20200378837
    • Publication date Dec 3, 2020
    • Applied Materials, Inc.
    • Dawei Sun
    • G01 - MEASURING TESTING
  • Information Patent Application

    FOAM IN ION IMPLANTATION SYSTEM
    • Publication number 20200083021
    • Publication date Mar 12, 2020
    • Varian Semiconductor Equipment Associates, Inc.
    • James Alan Pixley
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FOAM IN ION IMPLANTATION SYSTEM
    • Publication number 20200083027
    • Publication date Mar 12, 2020
    • Varian Semiconductor Equipment Associates, Inc.
    • James Alan Pixley
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA RESISTANT ELECTROSTATIC CLAMP
    • Publication number 20190252230
    • Publication date Aug 15, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DIFFUSION RESISTANT ELECTROSTATIC CLAMP
    • Publication number 20170335460
    • Publication date Nov 23, 2017
    • Dale K. Stone
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Apparatus For Improving Temperature Uniformity Of A Workpiece
    • Publication number 20160268150
    • Publication date Sep 15, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Dawei Sun
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA RESISTANT ELECTROSTATIC CLAMP
    • Publication number 20150228524
    • Publication date Aug 13, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DIFFUSION RESISTANT ELECTROSTATIC CLAMP
    • Publication number 20150214087
    • Publication date Jul 30, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOW EMISSIVITY ELECTROSTATIC CHUCK
    • Publication number 20140318455
    • Publication date Oct 30, 2014
    • Varian Semiconductor Equipment Associates, Inc.
    • Julian G. Blake
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    High Conductivity Electrostatic Chuck
    • Publication number 20130155569
    • Publication date Jun 20, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • David Suuronen
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    High Surface Resistivity Electrostatic Chuck
    • Publication number 20130070384
    • Publication date Mar 21, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Richard A. Cooke
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    PLATEN CLEANING METHOD
    • Publication number 20130037052
    • Publication date Feb 14, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • David Suuronen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRIBOELECTRIC CHARGE CONTROLLED ELECTROSTATIC CLAMP
    • Publication number 20120200980
    • Publication date Aug 9, 2012
    • Varian Semiconductor Equipment Associates, Inc.
    • Julian Blake
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLATEN TO CONTROL CHARGE ACCUMULATION
    • Publication number 20110036990
    • Publication date Feb 17, 2011
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REMOVAL OF CHARGE BETWEEN A SUBSTRATE AND AN ELECTROSTATIC CLAMP
    • Publication number 20100265631
    • Publication date Oct 21, 2010
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    COATED GRAPHITE LINERS
    • Publication number 20100140508
    • Publication date Jun 10, 2010
    • Julian G. Blake
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Platen Cleaning Method
    • Publication number 20100083980
    • Publication date Apr 8, 2010
    • David Suuronen
    • B08 - CLEANING
  • Information Patent Application

    IN-VACUUM PROTECTIVE LINERS
    • Publication number 20090179158
    • Publication date Jul 16, 2009
    • VARIAN SEMICONDUCTOR EQUPIMENT ASSOCIATE, INC.
    • Lyudmila Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EMBOSSED ELECTROSTATIC CHUCK
    • Publication number 20090122458
    • Publication date May 14, 2009
    • VARIAN SEMICONDUCTOR EPUIPMENT ASSOCIATED, INC.
    • D. Jeffrey Lischer
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TECHNIQUES FOR HANDLING SUBSTRATES
    • Publication number 20090003979
    • Publication date Jan 1, 2009
    • Varian Semiconductor Equipment Associates, Inc.
    • Dale K. Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK WITH SEPARATED ELECTRODES
    • Publication number 20080239614
    • Publication date Oct 2, 2008
    • Julian G. Blake
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Load lock control
    • Publication number 20070246658
    • Publication date Oct 25, 2007
    • Axcelis Technologies, Inc.
    • Tariq Fasheh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Bellows liner for an ion beam implanter
    • Publication number 20060071181
    • Publication date Apr 6, 2006
    • Axcelis Technologies, Inc.
    • Lyudmila Stone
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    In-situ monitoring on an ion implanter
    • Publication number 20050205807
    • Publication date Sep 22, 2005
    • Alexander S. Perel
    • G01 - MEASURING TESTING