Madhu Moorthy

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 8,513,116
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 8,211,799
- Issue date Jul 3, 2012
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of tungsten materials
- Patent number 7,964,505
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
- Patent number 7,745,333
- Issue date Jun 29, 2010
- Applied Materials, Inc.
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium or cobalt as an underlayer for tungsten film deposition
- Patent number 7,691,442
- Issue date Apr 6, 2010
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium as an underlayer for tungsten film deposition
- Patent number 7,429,402
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
- Patent number 7,405,158
- Issue date Jul 29, 2008
- Applied Materials, Inc.
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20120244699
- Publication date Sep 27, 2012
- Applied Materials, Inc.
- AMIT KHANDELWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20110244682
- Publication date Oct 6, 2011
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUTHENIUM AS AN UNDERLAYER FOR TUNGSTEN FILM DEPOSITION
- Publication number 20090142474
- Publication date Jun 4, 2009
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS
- Publication number 20090053893
- Publication date Feb 26, 2009
- Amit Khandelwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING TUNGSTEN LAYERS EMPLOYING ATOMIC LAYER DEPOS...
- Publication number 20080280438
- Publication date Nov 13, 2008
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ruthenium as an underlayer for tungsten film deposition
- Publication number 20060128150
- Publication date Jun 15, 2006
- APPLIED MATERIALS, INC.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for depositing tungsten layers employing atomic layer depos...
- Publication number 20060009034
- Publication date Jan 12, 2006
- Ken Kaung Lai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Madhu Moorthy

Person

Patents Grantslast 30 patents

Atomic layer deposition of tungsten materials

Atomic layer deposition of tungsten materials

Atomic layer deposition of tungsten materials

Methods for depositing tungsten layers employing atomic layer depos...

Ruthenium or cobalt as an underlayer for tungsten film deposition

Ruthenium as an underlayer for tungsten film deposition

Methods for depositing tungsten layers employing atomic layer depos...

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

RUTHENIUM AS AN UNDERLAYER FOR TUNGSTEN FILM DEPOSITION

ATOMIC LAYER DEPOSITION OF TUNGSTEN MATERIALS

METHODS FOR DEPOSITING TUNGSTEN LAYERS EMPLOYING ATOMIC LAYER DEPOS...

Ruthenium as an underlayer for tungsten film deposition

Methods for depositing tungsten layers employing atomic layer depos...