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Aalen, DE
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last 30 patents
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Patent Application
OPTICAL ASSEMBLY, METHOD FOR DEFORMING AN OPTICAL ELEMENT, AND PROJ...
Publication number
20230393485
Publication date
Dec 7, 2023
Carl Zeiss SMT GMBH
Tim Hoffmann
G02 - OPTICS
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Patent Application
METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL E...
Publication number
20230288260
Publication date
Sep 14, 2023
Carl Zeiss SMT GMBH
Johannes Schurer
G01 - MEASURING TESTING
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Patent Application
OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM
Publication number
20230176492
Publication date
Jun 8, 2023
Carl Zeiss SMT GMBH
Toralf GRUNER
G02 - OPTICS