Makiko KATANO

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Analytical apparatus, sample holder and analytical method
- Patent number 9,734,985
- Issue date Aug 15, 2017
- Kabushiki Kaisha Toshiba
- Haruko Akutsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity analysis device and method
- Patent number 8,932,954
- Issue date Jan 13, 2015
- Kabushiki Kaisha Toshiba
- Yuji Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample contamination method
- Patent number 8,771,535
- Issue date Jul 8, 2014
- Kabushiki Kaisha Toshiba
- Yuji Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing electronic device
- Patent number 8,119,020
- Issue date Feb 21, 2012
- Kabushiki Kaisha Toshiba
- Shoko Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersion lithography apparatus and exposure method
- Patent number 7,889,313
- Issue date Feb 15, 2011
- Kabushiki Kaisha Toshiba
- Makiko Katano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 7,232,763
- Issue date Jun 19, 2007
- Kabushiki Kaisha Toshiba
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of maintaining cleanliness of substrates and box for accommo...
- Patent number 6,284,020
- Issue date Sep 4, 2001
- Kabushiki Kaisha Toshiba
- Ayako Mizuno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ANALYTICAL APPARATUS, SAMPLE HOLDER AND ANALYTICAL METHOD
- Publication number 20170004954
- Publication date Jan 5, 2017
- KABUSHIKI KAISHA TOSHIBA
- Haruko AKUTSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANLINESS MEASURING CARRIAGE AND CLEANLINESS MEASURING SYSTEM
- Publication number 20140230522
- Publication date Aug 21, 2014
- Kabushiki Kaisha Toshiba
- Eri UEMURA
- G01 - MEASURING TESTING
Information Patent Application
IMPURITY ANALYSIS DEVICE AND METHOD
- Publication number 20130244349
- Publication date Sep 19, 2013
- Yuji Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE CONTAMINATION METHOD
- Publication number 20120149199
- Publication date Jun 14, 2012
- Yuji YAMADA
- G01 - MEASURING TESTING
Information Patent Application
MASK CLEANING METHOD, MASK CLEANING APPARATUS, AND PELLICLE
- Publication number 20110203611
- Publication date Aug 25, 2011
- Eri UEMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLEANING MASK AND MASK CLEANING APPARATUS
- Publication number 20110100393
- Publication date May 5, 2011
- Eri UEMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE FABRICATION MASK AND METHOD OF MANUFACTURING T...
- Publication number 20110053058
- Publication date Mar 3, 2011
- Kyo OTSUBO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion Lithography Apparatus and Exposure Method
- Publication number 20080106713
- Publication date May 8, 2008
- Makiko Katano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for manufacturing electronic device
- Publication number 20080023442
- Publication date Jan 31, 2008
- Shoko Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Local clean robot-transport plant and robot-transport manufacturing...
- Publication number 20070274814
- Publication date Nov 29, 2007
- Atsuko Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus and semiconductor device manufacturing method
- Publication number 20070268467
- Publication date Nov 22, 2007
- Makiko Katano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Air impurity measurement apparatus and method
- Publication number 20050169806
- Publication date Aug 4, 2005
- Makiko Katano
- G01 - MEASURING TESTING
Information Patent Application
Method of manufacturing semiconductor device
- Publication number 20050106866
- Publication date May 19, 2005
- Mitsuhiro Omura
- H01 - BASIC ELECTRIC ELEMENTS

Makiko KATANO

Person

Patents Grantslast 30 patents

Analytical apparatus, sample holder and analytical method

Impurity analysis device and method

Sample contamination method

Method for manufacturing electronic device

Immersion lithography apparatus and exposure method

Method of manufacturing semiconductor device

Method of maintaining cleanliness of substrates and box for accommo...

Patents Applicationslast 30 patents

ANALYTICAL APPARATUS, SAMPLE HOLDER AND ANALYTICAL METHOD

CLEANLINESS MEASURING CARRIAGE AND CLEANLINESS MEASURING SYSTEM

IMPURITY ANALYSIS DEVICE AND METHOD

SAMPLE CONTAMINATION METHOD

MASK CLEANING METHOD, MASK CLEANING APPARATUS, AND PELLICLE

METHOD OF CLEANING MASK AND MASK CLEANING APPARATUS

SEMICONDUCTOR DEVICE FABRICATION MASK AND METHOD OF MANUFACTURING T...

Immersion Lithography Apparatus and Exposure Method

Method for manufacturing electronic device

Local clean robot-transport plant and robot-transport manufacturing...

Exposure apparatus and semiconductor device manufacturing method

Air impurity measurement apparatus and method

Method of manufacturing semiconductor device