Makoto Hayakawa

Person

Koshi-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate inspection method, substrate treatment system, and comput...
- Patent number 11,513,081
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Takuya Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure apparatus adjustment method and storag...
- Patent number 10,558,125
- Issue date Feb 11, 2020
- Tokyo Electron Limited
- Teruhiko Moriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate inspection method, computer storage medium and substrate...
- Patent number 10,539,514
- Issue date Jan 21, 2020
- Tokyo Electron Limited
- Takuya Mori
- G01 - MEASURING TESTING
Information Patent Grant
Substrate position adjustment method, storage medium and substrate...
- Patent number 10,529,604
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Makoto Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method, substrate treatment system, and comput...
- Patent number 10,520,450
- Issue date Dec 31, 2019
- Tokyo Electron Limited
- Takuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and method
- Patent number 9,417,529
- Issue date Aug 16, 2016
- Tokyo Electron Limited
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment apparatus, method of transferring substrate, an...
- Patent number 9,026,240
- Issue date May 5, 2015
- Tokyo Electron Limited
- Makoto Hayakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection apparatus and method for operating the same
- Patent number 9,025,852
- Issue date May 5, 2015
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Coating and developing apparatus and method
- Patent number 8,985,880
- Issue date Mar 24, 2015
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method, defect inspection system, and computer re...
- Patent number 8,139,107
- Issue date Mar 20, 2012
- Tokyo Electron Limited
- Makoto Hayakawa
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method, defect inspection apparatus having a moun...
- Patent number 7,652,276
- Issue date Jan 26, 2010
- Tokyo Electron Limited
- Makoto Hayakawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE TREATMENT SYSTEM, AND COMPUT...
- Publication number 20200088654
- Publication date Mar 19, 2020
- TOKYO ELECTRON LIMITED
- Takuya MORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE POSITION ADJUSTMENT METHOD, STORAGE MEDIUM AND SUBSTRATE...
- Publication number 20190019701
- Publication date Jan 17, 2019
- TOKYO ELECTRON LIMITED
- Makoto HAYAKAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180164696
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko MORIYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE INSPECTION METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE...
- Publication number 20180156739
- Publication date Jun 7, 2018
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE TREATMENT SYSTEM, AND COMPUT...
- Publication number 20180143144
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Takuya MORI
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...
- Publication number 20180136567
- Publication date May 17, 2018
- TOKYO ELECTRON LIMITED
- Teruhiko MORIYA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20150219994
- Publication date Aug 6, 2015
- TOKYO ELECTRON LIMITED
- Nobuaki MATSUOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME
- Publication number 20120307045
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, METHOD OF TRANSFERRING SUBSTRATE, AN...
- Publication number 20120116567
- Publication date May 10, 2012
- TOKYO ELECTRON LIMITED
- Makoto HAYAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS AND METHOD
- Publication number 20120013859
- Publication date Jan 19, 2012
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Defect inspection method, defect inspection apparatus, and computer...
- Publication number 20070188832
- Publication date Aug 16, 2007
- TOKYO ELECTRON LIMITED
- Makoto Hayakawa
- G01 - MEASURING TESTING
Information Patent Application
Defect inspection method, defect inspection system, and computer re...
- Publication number 20070182814
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Makoto Hayakawa
- G01 - MEASURING TESTING

Makoto Hayakawa

Person

Patents Grantslast 30 patents

Substrate inspection method, substrate treatment system, and comput...

Exposure apparatus, exposure apparatus adjustment method and storag...

Substrate inspection method, computer storage medium and substrate...

Substrate position adjustment method, storage medium and substrate...

Substrate inspection method, substrate treatment system, and comput...

Coating and developing apparatus and method

Substrate treatment apparatus, method of transferring substrate, an...

Substrate inspection apparatus and method for operating the same

Coating and developing apparatus and method

Defect inspection method, defect inspection system, and computer re...

Defect inspection method, defect inspection apparatus having a moun...

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD, SUBSTRATE TREATMENT SYSTEM, AND COMPUT...

SUBSTRATE POSITION ADJUSTMENT METHOD, STORAGE MEDIUM AND SUBSTRATE...

OPTICAL PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE INSPECTION METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE...

SUBSTRATE INSPECTION METHOD, SUBSTRATE TREATMENT SYSTEM, AND COMPUT...

EXPOSURE APPARATUS, EXPOSURE APPARATUS ADJUSTMENT METHOD AND STORAG...

COATING AND DEVELOPING APPARATUS AND METHOD

SUBSTRATE INSPECTION APPARATUS AND METHOD FOR OPERATING THE SAME

SUBSTRATE TREATMENT APPARATUS, METHOD OF TRANSFERRING SUBSTRATE, AN...

COATING AND DEVELOPING APPARATUS AND METHOD

Defect inspection method, defect inspection apparatus, and computer...

Defect inspection method, defect inspection system, and computer re...