Defect inspection method, defect inspection system, and computer readable storage medium

Abstract

In the present invention, an image of a substrate is picked up by an image pickup unit with the substrate being held by a transfer member. A drive unit for the transfer member is controlled by a driving signal from a first controller. A driving signal outputted to the first controller is outputted also to a second controller so that the second controller controls the image pickup unit based on the driving signal, thereby synchronizing drive of the transfer member with the image pickup by the image pickup unit. According to the present invention, the throughput in performing a defect inspection for the substrate is improved and a precise image is captured and subjected to accurate inspection.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an explanatory view of the plane of a configuration of a coating and developing treatment apparatus including a defect inspection system according to an embodiment;

FIG. 2 is an explanatory view of the front of the coating and developing treatment apparatus in FIG. 1;

FIG. 3 is an explanatory view of the rear of the coating and developing treatment apparatus in FIG. 1;

FIG. 4 is an explanatory view of the side of an image pickup unit used in the defect inspection system according to the embodiment;

FIG. 5 is an explanatory view of the plane of the image pickup unit used in the defect inspection system according to the embodiment;

FIG. 6 is an explanatory view showing the outline of a configuration of the defect inspection system according to the embodiment;

FIG. 7 is an explanatory view showing a placement example of the image pickup unit of the defect inspection system according to the embodiment;

FIG. 8 is an explanatory view showing another placement example of the image pickup unit of the defect inspection system according to the embodiment;

FIG. 9 is an explanatory view showing the outline of a configuration of the defect inspection system according to another embodiment;

FIG. 10 is an explanatory view showing the outline of a configuration of the defect inspection system according to another embodiment;

FIG. 11 is an explanatory view showing the outline of a configuration of the defect inspection system according to another embodiment; and

FIG. 12 is an explanatory view showing the outline of a configuration of the defect inspection system according to another embodiment in which an image pickup device is provided on a transfer unit side.

Claims

1. A method of picking up an image of a substrate by an image pickup unit to inspect the substrate for a defect, wherein the image pickup is performed with the substrate being held and transferred by a transfer member for transferring the substrate, andwherein drive of the transfer member is synchronized with the image pickup by the image pickup unit when the image pickup unit picks up the image of the substrate.

2. The method as set forth in claim 1, wherein image capture by the image pickup unit is controlled based on a driving signal outputted from a controller to a drive unit for driving the transfer member.

3. The method as set forth in claim 1, wherein image capture by the image pickup unit is controlled based on a feedback signal outputted to a controller from a drive unit for driving the transfer member.

4. The method as set forth in claim 1, wherein drive of the transfer member is controlled based on a control signal for controlling a timing of image capture by the image pickup unit.

5. The method as set forth in claim 4, wherein the image capture timing is changed depending on a luminance on the substrate.

6. An inspection system for picking up an image of a substrate held by a transfer member for transferring the substrate to inspect the substrate for a defect, comprising: a drive unit for driving said transfer member;a first controller for controlling said drive unit;an image pickup unit for picking up an image of the substrate on said transfer member; anda second controller for controlling said image pickup unit,wherein a driving signal outputted from said first controller or outputted to said first controller in order to drive said drive unit is outputted also to said second controller so that said second controller controls said image pickup unit based on the driving signal.

7. An inspection system for picking up an image of a substrate held by a transfer member for transferring the substrate to inspect the substrate for a defect, comprising: a drive unit for driving said transfer member;a first controller for controlling said drive unit;an image pickup unit for picking up an image of the substrate on said transfer member; anda second controller for controlling said image pickup unit,wherein a feedback signal outputted from said drive unit to said first controller is outputted also to said second controller from said first controller directly or via another controller so that said second controller controls said image pickup unit based on the feedback signal.

8. An inspection system for picking up an image of a substrate held by a transfer member for transferring the substrate to inspect the substrate for a defect, comprising: a drive unit for driving said transfer member;a first controller for controlling said drive unit;an image pickup unit for picking up an image of the substrate on said transfer member; anda second controller for controlling said image pickup unit,wherein said second controller includes a reference clock for controlling a timing of image capture by said image pickup unit so that a driving signal is outputted to said first controller based on said reference clock.

9. The inspection system as set forth in claim 8, further comprising: a control unit for changing a cycle of said reference clock based on luminance information on the substrate being an image pickup object.

10. The inspection system as set forth in claim 8, wherein said reference clock is provided in said image pickup unit or another controller.

11. The inspection system as set forth in claim 6, wherein said image pickup unit is placed above a path in which the substrate is transferred by said transfer member.

12. The inspection system as set forth in claim 6, wherein said image pickup unit is provided at a transfer unit for supporting said transfer member.

13. A computer readable storage medium storing a computer program for causing a computer to execute a method of picking up an image of a substrate by an image pickup unit to inspect the substrate for a defect, wherein the image pickup is performed with the substrate being held and transferred by a transfer member for transferring the substrate, andwherein drive of the transfer member is synchronized with the image pickup by the image pickup unit when the image pickup unit picks up the image of the substrate.