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Polishing apparatus
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Patent number 7,115,026
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Issue date Oct 3, 2006
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Fujikoshi Machinery Corp.
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Makoto Nakajima
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 7,022,001
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Issue date Apr 4, 2006
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Fujikoshi Machinery Corp.
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Makoto Nakajima
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B24 - GRINDING POLISHING
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Polishing system for polishing wafer
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Patent number 5,908,347
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Issue date Jun 1, 1999
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Fujikoshi Kikai Kogyo Kabushiki Kaisha
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Makoto Nakajima
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Polishing machine
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Patent number 5,879,225
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Issue date Mar 9, 1999
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Fujikoshi Kikai Kogyo Kabushiki Kaisha
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Michio Kudo
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B24 - GRINDING POLISHING
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Polishing apparatus
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Patent number 5,549,502
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Issue date Aug 27, 1996
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Fujikoshi Machinery Corp.
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Kohichi Tanaka
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B24 - GRINDING POLISHING
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Polishing machine
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Patent number 5,441,444
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Issue date Aug 15, 1995
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Fujikoshi Kikai Kogyo Kabushiki Kaisha
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Makoto Nakajima
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B24 - GRINDING POLISHING